Patents by Inventor Peter J. Bjeletich

Peter J. Bjeletich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for determining layer thickness and composition using ellipsometric evaluation
    Patent number: 6884640
    Abstract: One embodiment of the present invention provides a system that determines the composition of a layer within an integrated device. The system operates by first receiving the integrated device. Next, the system measures properties of the layer using electromagnetic radiation. The properties of the layer measured are used to determine an index of refraction for the layer. The system then solves for the composition of the layer using the index of refraction.
    Type: Grant
    Filed: May 13, 2003
    Date of Patent: April 26, 2005
    Assignee: The Regents of the University of California
    Inventors: Jeffrey J. Peterson, Charles E. Hunt, Peter J. Bjeletich
  • Method and apparatus for determining layer thickness and composition using ellipsometric evaluation
    Publication number: 20040014250
    Abstract: One embodiment of the present invention provides a system that determines the composition of a layer within an integrated device. The system operates by first receiving the integrated device. Next, the system measures properties of the layer using electromagnetic radiation. The properties of the layer measured are used to determine an index of refraction for the layer. The system then solves for the composition of the layer using the index of refraction.
    Type: Application
    Filed: May 13, 2003
    Publication date: January 22, 2004
    Inventors: Jeffrey J. Peterson, Charles E. Hunt, Peter J. Bjeletich