Abstract: The present invention is related to the field of semiconductor processing equipment and methods and provides, in particular, methods and apparatus for in-situ removal of undesired deposits in the interiors of reactor chambers, for example, on chamber walls and elsewhere. The invention provides methods according to which cleaning steps are integrated and incorporated into a high-throughput growth process. Preferably, the times when growth should be suspended and cleaning commenced and when cleaning should be terminated and growth resumed are automatically determined based on sensor inputs. The invention also provides reactor chamber systems for the efficient performance of the integrated cleaning/growth methods of this invention.

Abstract: A method for detection of impurities at very low levels in hydrogen, oxygen or specialty gases comprises the metered mixture with high purity helium and subsequent selective separation of hydrogen, oxygen or specialty gas with the detection of impurities remaining in the helium by ionization spectrometry.

Abstract: A preparative-scale gas chromatographic system has conduits and valves adapted for analysis and collection of low volatility effluent. An injection site is provided for alternately supplying liquid solvent for removing condensed effluent from the system when the flow of effluent is terminated. Conduits are joined within the thermal conductivity detector of the system to prevent condensation at the joint. Conduits are provided with copper jackets which are coupled to sources of thermal energy to prevent condensation within the conduits. A trap filter provides backpressure in the collection system wherein recovery of condensed effluent in the filter is facilitated by the smooth surface of the filter.

Abstract: A preparative-scale gas chromatographic system has conduits and valves adapted for analysis and collection of low volatility effluent. An injection site is provided for alternately supplying liquid solvent for removing condensed effluent from the system when the flow of effluent is terminated. Conduits are joined within the thermal conductivity detector of the system to prevent condensation at the joint. Conduits are provided with copper jackets which are coupled to sources of thermal energy to prevent condensation within the conduits. A trap filter provides backpressure in the collection system wherein recovery of condensed effluent in the filter is facilitated by the smooth surface of the filter.

Abstract: The present invention relates to a process for the selective adsorption and separation of one or more constituents from a gas stream in a gas chromatograph, wherein the gas stream is contacted with a dehydrated chabazite adsorbent having a residual water content of less than 1.5 wt % and having at least 50% of any exchangeable ion capacity exchanged with a polyvalent metal cation. The process of the present invention both anticipates separation of the constituents due to either a difference in the heats of adsorption of the constituents or a size exclusion effect.

Abstract: The present invention relates to a process for the selective adsorption and separation of one or more constituents from a gas stream in a gas chromatograph, wherein the gas stream is contacted with a dehydrated chabazite adsorbent having a residual water content of less than 1.5 wt. % and having at least 50% of any exchangeable ion capacity exchanged with a polyvalent metal cation and wherein the dehydrated chabazite has been reacted with an oxidizing atmosphere either during or following dehydration. The process of the present invention both anticipates separation of the constituents due to either a difference in the heats of adsorption of the constituents or a size exclusion effect.

Abstract: A selective zeolitic adsorbent is prepared by activating a zeolitic composition having at least a portion, preferably at least 50%, of the exchangeable ion capacity occupied by a cation having a charge density of 2.0 or greater, preferably a divalent cation with a charge density of 2.0 or greater, such as calcium or magnesium by thoroughly dehydrating the exchanged zeolite. Additionally, separation ability of the zeolitic adsorbent can be further increased by reacting the thoroughly dehydrated zeolite in an oxidizing atmosphere.