Patents by Inventor Peter J. Wilkens

Peter J. Wilkens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CONDENSATION-ASSISTED METROLOGY
    Publication number: 20170219337
    Abstract: An analysis chamber for an optical-metrology tool includes an enclosure having an opening oriented toward an optical-metrology specimen and aligned substantially parallel to the specimen; at least one transparent window arranged in the enclosure; at least one fluid inlet passing through the enclosure, the fluid inlet coupled to an analysis-fluid source; and an enclosure support configured to hold the enclosure above and in proximity to the specimen.
    Type: Application
    Filed: January 28, 2016
    Publication date: August 3, 2017
    Inventors: Shahin Zangooie, Peter J. Wilkens
  • Line width control in a radiation sensitive polyimide
    Patent number: 5300403
    Abstract: Standard processing techniques for creating a patterned polyimide film from a radiation sensitive polyimide film forming composition are modified to include a post-develop, flood exposure/hardening step which crosslinks precursors of the polyimide film prior to curing. The flood exposure/hardening step prevents pull-back of the wall profile which occurs during the shrinkage of radiation sensitive polyimide film forming composition which occurs during thermal curing.
    Type: Grant
    Filed: June 18, 1992
    Date of Patent: April 5, 1994
    Assignee: International Business Machines Corporation
    Inventors: Marie Angelopolus, Daniel G. Berger, Eric D. Perfecto, Peter J. Wilkens