Patents by Inventor Peter Jacob Kramer

Peter Jacob Kramer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS OPERABLE TO PERFORM A MEASUREMENT OPERATION ON A SUBSTRATE, LITHOGRAPHIC APPARATUS, AND METHOD OF PERFORMING A MEASUREMENT OPERATION ON A SUBSTRATE
    Publication number: 20180364582
    Abstract: An apparatus and method for performing a measurement operation on a substrate in accordance with one or more substrate alignment models. The one or more substrate alignment models are selected from a plurality of candidate substrate alignment models. The apparatus, which may be a lithographic apparatus, includes an external interface which enables selection of the substrate alignment model(s) and/or alteration of the substrate alignment model(s) prior to the measurement operation.
    Type: Application
    Filed: May 31, 2018
    Publication date: December 20, 2018
    Applicant: ASML, Netherlands B.V.
    Inventors: Daan Maurits SLOTBOOM, Peter Jacob Kramer, Martinus Henrikus Antonius Leenders, Bart Dinand Paarhuis