Abstract: An apparatus for detecting defects on a disk surface includes a light source that generates a light beam and an acoustic-optic deflector that continuously dithers the light beam transmitted by the light source back and forth, producing a dithered output beam. The apparatus also includes at least one lens that forms a scan line on a disk surface from the dithered output beam with the scan line generating multiple scans and a detector that detects scattered light from defects on the disk surface passing through the dithered output beam of the scan line.

Abstract: Analytical systems and methods that use a modular interface structure for providing an interface between a sample substrate and an analytical unit, where the analytical unit typically has a particular interface arrangement for implementing various analytical and control functions. Using a number of variants for each module of the modular interface structure advantageously provides cost effective and efficient ways to perform numerous tests using a particular substrate or class of substrates with a particular analytical and control systems interface arrangement. Improved optical illumination and detection system for simultaneously analyzing reactions or conditions in multiple parallel microchannels are also provided.