Abstract: An evaporation device for evaporating hydrogen peroxide is provided. The device comprises a housing body having at least two fluid channels arranged therein. The fluid channels are connected to each other to form a common fluid line between an inlet and an outlet. The housing body also includes and at least one heating element positioned within said housing body for heating said fluid channels. A first fluid channel, directly connected to the fluid inlet, is positioned relative to the at least one heating element such that its inner walls are heated to a first temperature, and a second fluid channel, being directly connected to the fluid outlet, is positioned relative to the at least one heating element such that its inner walls are heated to a second temperature. In some embodiments, said second temperature is higher than the first temperature.