Patents by Inventor Peter John Biles

Peter John Biles has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Carbon hard mask for aluminum interconnect fabrication
    Publication number: 20040180551
    Abstract: A carbon hard mask (62) for patterning an aluminum layer (58) in a microelectronics device (50). The carbon hard mask will release carbon during a reactive ion etch process, thereby eliminating the need to use CHF3 as a passivation gas. Portions of the carbon hard mask remaining after the RIE process are removed during the subsequent strip passivation process without the need for a separate mask removal step.
    Type: Application
    Filed: March 13, 2003
    Publication date: September 16, 2004
    Inventors: Peter John Biles, Stephen Ward Downey, Thomas Craig Esry