Patents by Inventor Peter Kuschnerus

Peter Kuschnerus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for repairing phase shift masks
    Patent number: 8268516
    Abstract: The invention relates to a method for repairing phase shift masks for photolithography in which a phase shift mask is checked for the presence of defects and, if defects are present, (i) an analysis is conducted as to which of the defects negatively affect imaging properties of the phase shift mask, (ii) said defects are improved, (iii) the imaging properties of the improved phase shift mask are analyzed and the maintenance of a predetermined tolerance criterion is checked, and (iv) the two preceding steps (ii) and (iii) are optionally repeated multiple times if the imaging properties do not meet the predetermined tolerance criterion.
    Type: Grant
    Filed: November 14, 2008
    Date of Patent: September 18, 2012
    Assignee: Carl Zeiss SMS GmbH
    Inventors: Axel Zibold, Peter Kuschnerus, Oliver Kienzle
  • METHOD FOR REPAIRING PHASE SHIFT MASKS
    Publication number: 20100266937
    Abstract: The invention relates to a method for repairing phase shift masks for photolithography in which a phase shift mask is checked for the presence of defects and, if defects are present, (i) an analysis is conducted as to which of the defects negatively affect imaging properties of the phase shift mask, (ii) said defects are improved, (iii) the imaging properties of the improved phase shift mask are analyzed and the maintenance of a predetermined tolerance criterion is checked, and (iv) the two preceding steps (ii) and (iii) are optionally repeated multiple times if the imaging properties do not meet the predetermined tolerance criterion.
    Type: Application
    Filed: November 14, 2008
    Publication date: October 21, 2010
    Applicant: CARL ZEISS SMS GMBH
    Inventors: Axel Zibold, Peter Kuschnerus, Oliver Kienzle