Abstract: A method of aligning an image at a desired position on a substrate support including providing a radiation source producing desired wavelengths of radiation. A fluorescing medium is provided on a substrate support. The radiation is directed toward the substrate support. At least one filter is positioned between the radiation source and the substrate support. A mask is positioned between the radiation source and the substrate support. The mask selectively transmits the radiation. The substrate support is irradiated with the radiation, thereby causing the fluorescing medium to fluoresce. A position of the radiation impacting upon the substrate support is detected with at least one detector by detecting an image of the fluorescing medium. A signal corresponding to the detected position of the radiation is produced.

Abstract: An apparatus for aligning an image on a substrate support. A substrate support supports a substrate to be treated by radiation. At least one radiation source produces desired wavelengths of radiation to treat the substrate. The radiation is directed toward the substrate support. At least one filter filters selected wavelengths of the radiation. The filter is positioned between the substrate support and the radiation source. A mask selectively transmits the radiation. The mask is positioned between the radiation source and the substrate support. At least one detector detects a position of radiation impinging upon the substrate support and produces a signal corresponding to the sensed position. The detected position is compared with a desired position of radiation impinging upon the substrate support. The detected position is compared to the desired position and a signal is produced corresponding to the comparison. A positioner positions the substrate support in a desired position for treating the substrate.