Patents by Inventor Peter L. D. Chang

Peter L. D. Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7880231
    Abstract: A method and the resultant memory is described for forming an array of floating body memory cells and logic transistors on an SOI substrate. The floating bodies for the cells are formed over the buried oxide, the transistors in the logic section are formed in the bulk silicon.
    Type: Grant
    Filed: September 16, 2009
    Date of Patent: February 1, 2011
    Assignee: Intel Corporation
    Inventor: Peter L. D. Chang
  • Patent number: 7859028
    Abstract: A double gate, dynamic storage device and method of fabrication are disclosed. A back (bias gate) surrounds three sides of a semiconductor body with a front gate disposed on the remaining surface. Two different gate insulators and gate materials may be used.
    Type: Grant
    Filed: February 11, 2009
    Date of Patent: December 28, 2010
    Assignee: Intel Corporation
    Inventors: Ibrahim Ban, Peter L. D. Chang
  • Patent number: 7859053
    Abstract: A method for fabricating double-gate and tri-gate transistors in the same process flow is described. In one embodiment, a sacrificial layer is formed over stacks that include semiconductor bodies and insulative members. The sacrificial layer is planarized prior to forming gate-defining members. After forming the gate-defining members, remaining insulative member portions are removed from above the semiconductor body of the tri-gate device but not the I-gate device. This facilitates the formation of metallization on three sides of the tri-gate device, and the formation of independent gates for the I-gate device.
    Type: Grant
    Filed: January 18, 2006
    Date of Patent: December 28, 2010
    Assignee: Intel Corporation
    Inventors: Peter L. D. Chang, Brian S. Doyle
  • Patent number: 7851862
    Abstract: A method for making floating body memory cells from a bulk substrate. A thin silicon germanium and overlying silicon layers are formed on the bulk substrate. Anchors and a bridge are formed to support the silicon layer when the silicon germanium layer is etched so that it can be replaced with an oxide.
    Type: Grant
    Filed: April 2, 2009
    Date of Patent: December 14, 2010
    Assignee: Intel Corporation
    Inventor: Peter L. D. Chang
  • Publication number: 20100297838
    Abstract: A method for fabricating double-gate and tri-gate transistors in the same process flow is described. In one embodiment, a sacrificial layer is formed over stacks that include semiconductor bodies and insulative members. The sacrificial layer is planarized prior to forming gate-defining members. After forming the gate-defining members, remaining insulative member portions are removed from above the semiconductor body of the tri-gate device but not the I-gate device. This facilitates the formation of metallization on three sides of the tri-gate device, and the formation of independent gates for the I-gate device.
    Type: Application
    Filed: August 6, 2010
    Publication date: November 25, 2010
    Inventors: Peter L.D. Chang, Brian S. Doyle
  • Publication number: 20100165772
    Abstract: In some embodiments all cells within a word-line of a floating body cell memory are erased. A back-gate of the floating body cell memory is self-aligned with the word line, and the erasing is performed using a back-gate bias. Other embodiments are described and claimed.
    Type: Application
    Filed: December 30, 2008
    Publication date: July 1, 2010
    Inventors: Uygar E. Avci, Peter L. D. Chang, David L. Kencke
  • Patent number: 7652910
    Abstract: Provided herein are embodiments of layouts for applying impact ionization potentials across the channel of a selected floating body cell in an array without having to impose the potential on other unselected cells.
    Type: Grant
    Filed: June 30, 2007
    Date of Patent: January 26, 2010
    Assignee: Intel Corporation
    Inventors: Uygar E. Avci, Peter L. D. Chang, Dinesh Somasekhar
  • Publication number: 20100006941
    Abstract: A method and the resultant memory is described for forming an array of floating body memory cells and logic transistors on an SOI substrate. The floating bodies for the cells are formed over the buried oxide, the transistors in the logic section are formed in the bulk silicon.
    Type: Application
    Filed: September 16, 2009
    Publication date: January 14, 2010
    Inventor: Peter L.D. Chang
  • Patent number: 7592209
    Abstract: A method and the resultant memory is described for forming an array of floating body memory cells and logic transistors on an SOI substrate. The floating bodies for the cells are formed over the buried oxide, the transistors in the logic section are formed in the bulk silicon.
    Type: Grant
    Filed: November 13, 2006
    Date of Patent: September 22, 2009
    Assignee: Intel Corporation
    Inventor: Peter L. D. Chang
  • Publication number: 20090224358
    Abstract: A method for making floating body memory cells from a bulk substrate. A thin silicon germanium and overlying silicon layers are formed on the bulk substrate. Anchors and a bridge are formed to support the silicon layer when the silicon germanium layer is etched so that it can be replaced with an oxide.
    Type: Application
    Filed: April 2, 2009
    Publication date: September 10, 2009
    Inventor: Peter L.D. Chang
  • Patent number: 7563701
    Abstract: Self-aligned contacts for transistors and methods for fabricating the contacts are described. An etch resistant material is patterned to create an opening that resides above a transistor gate structure. A selective etch is performed through the opening that does not etch the transistor gate structure but does etch material that resides laterally with respect to the transistor gate structure in order to expose tops, immediately adjacent to the transistor gate structure, of drain and source regions of a diffusion layer of the transistor. Conductive material is deposited that covers respective tops of the drain and source regions of the diffusion layer of the transistor to a depth that does not short the drain and source region of the diffusion layer of the transistor. A layer above the conductive material is formed.
    Type: Grant
    Filed: March 31, 2005
    Date of Patent: July 21, 2009
    Assignee: Intel Corporation
    Inventors: Peter L. D. Chang, Brian S. Doyle
  • Patent number: 7560358
    Abstract: A method of preparing active silicon regions for CMOS or other devices includes providing a structure including a silicon substrate (210, 410) having formed thereon first and second silicon diffusion lines (110, 420), both of which include first and second silicon layers (211, 213, 421, 423), a silicon germanium layer (212, 422), and a mask layer (214, 424). The method further includes forming an oxide layer (430) in first and second regions of the structure, forming a polysilicon layer (510) over the oxide layer, removing the polysilicon layer from the first region and depositing oxide (610) therein in order to form an oxide anchor, removing the polysilicon layer from the second region, removing the silicon germanium layer, filling the first and second gaps with an electrically insulating material (910), and depositing oxide in the second region.
    Type: Grant
    Filed: December 31, 2007
    Date of Patent: July 14, 2009
    Assignee: Intel Corporation
    Inventors: Seiyon Kim, Peter L. D. Chang, Ibrahim Ban, Willy Rachmady
  • Publication number: 20090170279
    Abstract: A method of preparing active silicon regions for CMOS devices includes providing a structure including a silicon substrate (210, 410) having formed thereon first and second silicon diffusion lines (110, 420), both of which include first and second silicon layers (211, 213, 421, 423), a silicon germanium layer (212, 422), and an electrically insulating layer (214, 424). The method further includes forming an oxide layer (430) in first and second regions of the structure, forming a polysilicon layer (510) over the oxide layer, removing the polysilicon layer from the first region and depositing oxide (610) therein in order to form an oxide anchor, removing the polysilicon layer from the second region, removing the silicon germanium layer, filling the first and second gaps with an electrically insulating material (910), and depositing oxide in the second region.
    Type: Application
    Filed: December 31, 2007
    Publication date: July 2, 2009
    Inventors: Seiyon Kim, Peter L. D. Chang, Ibrahim Ban, Willy Rachmady
  • Publication number: 20090159975
    Abstract: An apparatus including a first diffusion formed on a substrate, the first diffusion including a pair of channels, each of which separates a source from a drain; a second diffusion formed on the substrate, the second diffusion including a channel that separates a source from a drain; a first gate electrode formed on the substrate, wherein the first gate electrode overlaps one of the pair of channels on the first diffusion to form a pass-gate transistor; and a second gate electrode formed on the substrate, wherein the second gate electrode overlaps one of the pair of channels of the first diffusion to form a pull-down transistor and overlaps the channel of the second diffusion to form a pull-up transistor, and wherein the pass-gate, pull-down and pull-up transistors are of at least two different constructions. Other embodiments are disclosed and claimed.
    Type: Application
    Filed: January 29, 2009
    Publication date: June 25, 2009
    Applicant: INTEL CORPORATION
    Inventor: Peter L.D. Chang
  • Publication number: 20090146208
    Abstract: A double gate, dynamic storage device and method of fabrication are disclosed. A back (bias gate) surrounds three sides of a semiconductor body with a front gate disposed on the remaining surface. Two different gate insulators and gate materials may be used.
    Type: Application
    Filed: February 11, 2009
    Publication date: June 11, 2009
    Inventors: Ibrahim Ban, Peter L.D. Chang
  • Patent number: 7531879
    Abstract: A method for making floating body memory cells from a bulk substrate. A thin silicon germanium and overlying silicon layers are formed on the bulk substrate. Anchors and a bridge are formed to support the silicon layer when the silicon germanium layer is etched so that it can be replaced with an oxide.
    Type: Grant
    Filed: December 22, 2006
    Date of Patent: May 12, 2009
    Assignee: Intel Corporation
    Inventor: Peter L. D. Chang
  • Patent number: 7512017
    Abstract: An apparatus including a first diffusion formed on a substrate, the first diffusion including a pair of channels, each of which separates a source from a drain; a second diffusion formed on the substrate, the second diffusion including a channel that separates a source from a drain; a first gate electrode formed on the substrate, wherein the first gate electrode overlaps one of the pair of channels on the first diffusion to form a pass-gate transistor; and a second gate electrode formed on the substrate, wherein the second gate electrode overlaps one of the pair of channels of the first diffusion to form a pull-down transistor and overlaps the channel of the second diffusion to form a pull-up transistor, and wherein the pass-gate, pull-down and pull-up transistors are of at least two different constructions. Other embodiments are disclosed and claimed.
    Type: Grant
    Filed: December 21, 2005
    Date of Patent: March 31, 2009
    Assignee: Intel Corporation
    Inventor: Peter L. D. Chang
  • Patent number: 7498211
    Abstract: A doubled gate, dynamic storage device and method of fabrication are disclosed. A back (bias gate) surrounds three sides of a semiconductor body with a front gate disposed on the remaining surface. Two different gate insulators and gate materials may be used.
    Type: Grant
    Filed: December 28, 2005
    Date of Patent: March 3, 2009
    Assignee: Intel Corporation
    Inventors: Ibrahim Ban, Peter L. D. Chang
  • Publication number: 20090017589
    Abstract: Dual-gate memory cells and tri-gate CMOS devices are integrated on a common substrate. A plurality of silicon bodies are formed from a monocrystalline silicon on the substrate to define a plurality of transistors including dual-gate memory cells, PMOS transistors, and NMOS transistors. An insulative layer is formed overlying the silicon body of the memory cell. A layer of a high-k dielectric and at least a metal layer cover the silicon bodies and their overlying layers. Next, gain regions of the transistors are filled with polysilicon. Thus, a gate is formed on the top surface and both sidewalls of a tri-gate transistor. Thereafter, the high-k dielectric and the metal layer overlying the insulative layer of the memory cell are removed to expose the insulative layer. Thus, two electrically-isolated gates of the memory cell are formed.
    Type: Application
    Filed: September 12, 2008
    Publication date: January 15, 2009
    Inventors: Ibrahim Ban, Peter L.D. Chang
  • Publication number: 20090003050
    Abstract: Provided herein are embodiments of layouts for applying impact ionization potentials across the channel of a selected floating body cell in an array without having to impose the potential on other unselected cells.
    Type: Application
    Filed: June 30, 2007
    Publication date: January 1, 2009
    Inventors: Uygar E. Avci, Peter L.D. Chang, Dinesh Somasekhar