Patents by Inventor Peter L. Timms

Peter L. Timms has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas stream purification apparatus
    Patent number: 5538702
    Abstract: A method for the treatment of a stream of exhaust gases including phosphine in which the stream is heated to a sufficiently high temperature to decompose the phosphine to phosphorus vapor and the stream is then passed into a reactor containing calcium oxide heated to above about 100.degree. C. An oxygen containing stream is also passed into the reactor.
    Type: Grant
    Filed: February 8, 1994
    Date of Patent: July 23, 1996
    Assignee: The BOC Group plc
    Inventors: James R. Smith, Peter L. Timms
  • Exhaust gas conditioning
    Patent number: 5486340
    Abstract: A method treating effluent gases including exposing the gases to silicon or a silicon rich alloy or substances at an elevated temperature.
    Type: Grant
    Filed: June 24, 1994
    Date of Patent: January 23, 1996
    Assignee: The BOC Group plc
    Inventors: James R. Smith, Peter L. Timms
  • Dry exhaust gas conditioning
    Patent number: 5417934
    Abstract: A gas treatment method and apparatus for use in connection with processes of etching semiconductor devices or of plasma enhanced chemical vapor deposition onto semiconductor materials. In accordance with the method and apparatus, the exhaust gases are introduced into first and second stages while heating the first and second stages. The stages can be contained within a heated cartridge. The first stage contains silicon or a silicon-rich alloy or a silicon-rich substance in a particulate form and a partial coating of copper or a copper rich substance in intimate contact with the silicon, the silicon-rich alloy or the silicon-rich substance. The second stage contains calcium oxide, a calcium oxide containing material, or a soda lime containing medium.
    Type: Grant
    Filed: January 26, 1993
    Date of Patent: May 23, 1995
    Assignee: BOC Limited
    Inventors: James R. Smith, Peter L. Timms
  • Dry exhaust gas conditioning
    Patent number: 5213767
    Abstract: This invention relates to gas treatment apparatus and methods and particularly, but not exclusively, to such apparatus and methods for use with exhaust products from semi-conductor manufacturing process.A reactor column 10 has an inlet 11 at the bottom and an outlet 12. Between the inlet and outlet it is divided into three sequential stages containing: silicon or silicon containing materials; lime or soda lime and copper oxide or copper oxide reagents.
    Type: Grant
    Filed: December 3, 1990
    Date of Patent: May 25, 1993
    Assignee: BOC Limited
    Inventors: James R. Smith, Peter L. Timms
  • Polysiloxane oils and process for their preparation
    Patent number: 5034554
    Abstract: A process for producing a polysiloxane oil with aryl groups and oxygen atoms as co-substituents on the silicon atoms. Silicon monoxide gas is reacted under a vacumm with iodine and an aromatic compound such as toluene in solution at a low temperature in the region of -75.degree. C. to -95.degree. C.
    Type: Grant
    Filed: June 28, 1990
    Date of Patent: July 23, 1991
    Assignee: Elkem a/s
    Inventors: Peter L. Timms, William N. Rowlands