Patents by Inventor Peter Lembesis

Peter Lembesis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Post Plasma Gas Injection In A Separation Grid
    Publication number: 20200243305
    Abstract: A plasma process apparatus is provided. The plasma processing apparatus includes a plasma chamber and a processing chamber. The processing chamber includes a substrate holder operable to support a substrate. The plasma processing apparatus further includes a separation grid separating the plasma chamber from the processing chamber. The separation grid includes a gas delivery system. The gas delivery system defines a channel, an inlet and a plurality of outlets in fluid communication with the inlet via the channel. The gas delivery system is configured to reduce non-uniformities associated with a treatment process performed on the substrate.
    Type: Application
    Filed: January 16, 2020
    Publication date: July 30, 2020
    Inventors: Weimin Zeng, Chun Yan, Dixit V. Desai, Hua Chung, Michael X. Yang, Peter Lembesis, Ryan M. Pakulski, Martin Zucker
  • Apparatus and methods for generating electromagnetic radiation
    Patent number: 9245730
    Abstract: An apparatus for generating electromagnetic radiation includes an envelope, a vortex generator configured to generate a vortexing flow of liquid along an inside surface of the envelope, first and second electrodes within the envelope configured to generate a plasma arc therebetween, and an insulative housing associated surrounding at least a portion of an electrical connection to one of the electrodes. The apparatus further includes a shielding system configured to block electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of the insulative housing. The apparatus further includes a cooling system configured to cool the shielding system.
    Type: Grant
    Filed: February 24, 2012
    Date of Patent: January 26, 2016
    Assignee: Mattson Technology, Inc.
    Inventors: Amar B. Kamdar, David Malcolm Camm, Mladen Bumbulovic, Peter Lembesis
  • APPARATUS AND METHODS FOR GENERATING ELECTROMAGNETIC RADIATION
    Publication number: 20150035436
    Abstract: An apparatus for generating electromagnetic radiation includes an envelope, a vortex generator configured to generate a vortexing flow of liquid along an inside surface of the envelope, first and second electrodes within the envelope configured to generate a plasma arc therebetween, and an insulative housing associated surrounding at least a portion of an electrical connection to one of the electrodes. The apparatus further includes a shielding system configured to block electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of the insulative housing. The apparatus further includes a cooling system configured to cool the shielding system.
    Type: Application
    Filed: February 24, 2012
    Publication date: February 5, 2015
    Applicant: MATTSON TECHNOLOGY, INC.
    Inventors: Amar B. Kamdar, David Malcolm Camm, Mladen Bumbulovic, Peter Lembesis