Patents by Inventor Peter M. N. Vandenabeele

Peter M. N. Vandenabeele has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for measuring temperature radiation using a pyrometer wherein compensation lamps are used
    Patent number: 5271084
    Abstract: Method and apparatus for measuring the radiation originating from one side of a wafer of semiconductor material using a pyrometer, wherein non-blackbody compensation radiation is projected onto that side to compensate for the reflectivity of the wafer of material and wherein the intensity of the non-blackbody compensation radiation is controlled subject to the amount of radiation measured by the pyrometer.
    Type: Grant
    Filed: October 6, 1992
    Date of Patent: December 14, 1993
    Assignee: Interuniversitair Micro Elektronica Centrum vzw
    Inventors: Peter M. N. Vandenabeele, Karen I. J. Maex