Patents by Inventor Peter M. Seitz

Peter M. Seitz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optoelectronic system for determining surface irregularities of a workpiece having a nominally plane reflective surface
    Patent number: 5003615
    Abstract: By comparing the distorted image of an edge pattern, such as a checker board pattern, reflected from the surface of a work piece, such as a silicon wafer, and received by a solid state television camera, with a similar image, reflected from the optically flat surface of a calibration piece substituted for the work piece, surface height irregularities, such as warpage, of the work piece can be measured with a high sensitivity and a large dynamic range at relatively low cost.
    Type: Grant
    Filed: December 1, 1988
    Date of Patent: March 26, 1991
    Assignee: Harris Semiconductor Patents, Inc.
    Inventor: Peter M. Seitz