Abstract: A vacuum device is provided which forms an autarkic subassembly and includes a vacuum container, a vacuum pump connected to the vacuum container, a vacuum connection for connecting to an external installation, and a control device designed for control of the vacuum pump. The vacuum device serves as a suction device to produce a vacuum in and to suck or draw off gas from this connected installation. The vacuum device is designed as an autarkic (self-sufficient or self-contained) subassembly, which can be connected for example to an electron microscope.