Patents by Inventor Peter Match

Peter Match has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer chucking monitor
    Patent number: 11837481
    Abstract: This disclosure describes systems, methods, and apparatus for non-invasive wafer chuck monitoring using a low voltage AC signal injected into a high voltage DC chucking voltage provided to a wafer chuck. Monitoring the injected signal can provide insight into the wafer chucking state and remedial actions, such as realignment of the wafer with the wafer chuck, can be carried out. Because of the low voltage nature of the AC signal, wafer chuck monitoring can be performed without influencing chucking performed by the higher voltage DC chucking voltage.
    Type: Grant
    Filed: December 22, 2022
    Date of Patent: December 5, 2023
    Assignee: Advanced Energy Industries, Inc.
    Inventors: Peter Match, Carlos Alicea
  • WAFER CHUCKING MONITOR
    Publication number: 20230130919
    Abstract: This disclosure describes systems, methods, and apparatus for non-invasive wafer chuck monitoring using a low voltage AC signal injected into a high voltage DC chucking voltage provided to a wafer chuck. Monitoring the injected signal can provide insight into the wafer chucking state and remedial actions, such as realignment of the wafer with the wafer chuck, can be carried out. Because of the low voltage nature of the AC signal, wafer chuck monitoring can be performed without influencing chucking performed by the higher voltage DC chucking voltage.
    Type: Application
    Filed: December 22, 2022
    Publication date: April 27, 2023
    Inventors: Peter Match, Carlos Alicea
  • Wafer chucking monitor using high frequency injected AC signal
    Patent number: 11562918
    Abstract: This disclosure describes systems, methods, and apparatus for non-invasive wafer chuck monitoring using a low voltage AC signal injected into a high voltage DC chucking voltage provided to a wafer chuck. Monitoring the injected signal can provide insight into the wafer chucking state and remedial actions, such as realignment of the wafer with the wafer chuck, can be carried out. Because of the low voltage nature of the AC signal, wafer chuck monitoring can be performed without influencing chucking performed by the higher voltage DC chucking voltage.
    Type: Grant
    Filed: January 7, 2021
    Date of Patent: January 24, 2023
    Assignee: Advanced Energy Industries, Inc.
    Inventors: Peter Match, Carlos Alicea
  • WAFER CHUCKING MONITOR USING HIGH FREQUENCY INJECTED AC SIGNAL
    Publication number: 20220216080
    Abstract: This disclosure describes systems, methods, and apparatus for non-invasive wafer chuck monitoring using a low voltage AC signal injected into a high voltage DC chucking voltage provided to a wafer chuck. Monitoring the injected signal can provide insight into the wafer chucking state and remedial actions, such as realignment of the wafer with the wafer chuck, can be carried out. Because of the low voltage nature of the AC signal, wafer chuck monitoring can be performed without influencing chucking performed by the higher voltage DC chucking voltage.
    Type: Application
    Filed: January 7, 2021
    Publication date: July 7, 2022
    Inventors: Peter Match, Carlos Alicea
  • High voltage connector
    Patent number: 7192306
    Abstract: A connector having a cylindrical hollow body having a first, closed end and a second, open end. A first external thread extends from the first end toward the second end and a second external thread extends from the second end toward the first end. Additionally, a contact element extends concentrically from the closed first end of the hollow body.
    Type: Grant
    Filed: July 6, 2005
    Date of Patent: March 20, 2007
    Assignee: Ultra Volt, Inc.
    Inventors: James Morrison, Peter Match, John D Tanner, Scott Orban, Michael P Falco, Scott R Wilson
  • HIGH VOLTAGE CONNECTOR
    Publication number: 20070010142
    Abstract: A connector having a cylindrical hollow body having a first, closed end and a second, open end. A first external thread extends from the first end toward the second end and a second external thread extends from the second end toward the first end. Additionally, a contact element extends concentrically from the closed first end of the hollow body.
    Type: Application
    Filed: July 6, 2005
    Publication date: January 11, 2007
    Inventors: James Morrison, Peter Match, John Tanner, Scott Orban, Michael Falco, Scott Wilson