Patents by Inventor Peter Michael Eisenberger

Peter Michael Eisenberger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • X-ray photolithography
    Patent number: 4028547
    Abstract: Photolithography of microcircuits with elements in the micrometer size range is performed with X-ray exposure of photoresist layers through electron beam generated shadow masks. Synchrotron radiation from a particle accelerator is used as an intense source of well collimated X-rays and Bragg reflection from a mosaic crystal is used to provide spectral purity for good contrast in the exposed photoresist pattern.
    Type: Grant
    Filed: June 30, 1975
    Date of Patent: June 7, 1977
    Assignee: Bell Telephone Laboratories, Incorporated
    Inventor: Peter Michael Eisenberger