Patents by Inventor Peter Mikula

Peter Mikula has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for plasma processing a workpiece in an enveloping plasma
    Patent number: 5859404
    Abstract: A plasma heating apparatus for heating a workpiece includes a chamber of sufficient size to receive a workpiece therein and a source of a reduced gas pressure within the chamber of from about 0.01 to about 100 millitorr. The plasma heating apparatus further includes a plasma source of an enveloping plasma. Optionally, a workpiece voltage may be applied between the workpiece and the wall of the chamber, and a source of a reactive gas can be provided to backfill the chamber, and radiant heaters can be provided to independently heat portions of the workpiece. In operation, the plasma source produces a plasma that surrounds and heats the workpiece. The plasma and the heating of the workpiece are tailored to achieve controllably uniform or nonuniform heat treatment and/or surface treatment of the workpiece.
    Type: Grant
    Filed: October 12, 1995
    Date of Patent: January 12, 1999
    Assignees: Hughes Electronics Corporation, General Motors Corporation
    Inventors: Ronghua R. Wei, Jesse N. Matossian, Peter Mikula, Deborah Clark