Patents by Inventor Peter Muenzinger

Peter Muenzinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of oxidation of semiconductor wafers in a rapid thermal processing (RTP) system
    Patent number: 5935650
    Abstract: A method of producing a film on the surface of a semiconductor wafer in an RTP system, comprising: a) rapidly processing the wafer at a first temperature T.sub.1 in an atmosphere containing a substantial vapor pressure of a first reactive gas; then b) rapidly processing the wafer at a second temperature T.sub.2 in an atmosphere substantially free of the first reactive gas is described.
    Type: Grant
    Filed: October 17, 1997
    Date of Patent: August 10, 1999
    Inventors: Wilfried Lerch, Georg Roters, Peter Muenzinger, Roland Mader