Patents by Inventor Peter ONKEN

Peter ONKEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110195184
    Abstract: A protection device is adapted for protecting substrates within a process chamber against deposition material generated by a deposition source. The protection device includes a plate adapted for facing the substrate at a side opposing the deposition source and a mesh disposed over the plate. The mesh faces the substrate to be processed.
    Type: Application
    Filed: February 15, 2010
    Publication date: August 11, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Peter ONKEN, Sven SCHRAMM