Patents by Inventor Peter R. Wassei

Peter R. Wassei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Using identifiers to map edge ring part numbers onto slot numbers
    Patent number: 10651097
    Abstract: Methods and systems for tracking an edge ring includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is being assigned to the edge ring carrier. The edge ring identifier is tracked to determine transfers into and out of the edge ring carrier and into and out of a processing station. The tracking of the edge ring identifier builds a metadata file that provides lifetime information regarding the edge ring.
    Type: Grant
    Filed: August 30, 2018
    Date of Patent: May 12, 2020
    Assignee: Lam Research Corporation
    Inventors: Evelio Sevillano, Thomas Chang, Robert O'Donnell, Ronda Ropes, Peter R. Wassei, Bridget Hill
  • USING IDENTIFIERS TO MAP EDGE RING PART NUMBERS ONTO SLOT NUMBERS
    Publication number: 20200075430
    Abstract: Methods and systems for tracking an edge ring includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is being assigned to the edge ring carrier. The edge ring identifier is tracked to determine transfers into and out of the edge ring carrier and into and out of a processing station. The tracking of the edge ring identifier builds a metadata file that provides lifetime information regarding the edge ring.
    Type: Application
    Filed: August 30, 2018
    Publication date: March 5, 2020
    Inventors: Evelio Sevillano, Thomas Chang, Robert O'Donnell, Ronda Ropes, Peter R. Wassei, Bridget Hill
  • Equipment front end module gas recirculation
    Patent number: 10566216
    Abstract: Disclosed are methods and apparatuses for recirculating gas in an equipment front end module (“EFEM”), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: February 18, 2020
    Assignee: Lam Research Corporation
    Inventors: Brandon Lee Senn, Peter R. Wassei, Scott Vernon Wong, Silvia Rocio Aguilar Amaya, Todd Anthony Lopes, Richard Howard Gould, James Donald Keller, Steven Edmund Pracko
  • EQUIPMENT FRONT END MODULE GAS RECIRCULATION
    Publication number: 20180358239
    Abstract: Disclosed are methods and apparatuses for recirculating gas in an equipment front end module (“EFEM”), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.
    Type: Application
    Filed: June 9, 2017
    Publication date: December 13, 2018
    Inventors: Brandon Lee Senn, Peter R. Wassei, Scott Vernon Wong, Silvia Rocio Aguilar Amaya, Todd Anthony Lopes, Richard Howard Gould, James Donald Keller, Steven Edmund Pracko