Patents by Inventor Peter REUSTLE

Peter REUSTLE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for treating substrates using a support roller having a porous material
    Patent number: 11062929
    Abstract: A device for treating substrates by a treating liquid has at least one rotatably supported support roller which a substrate to be treated rests on during operation. The support roller has a hollow cylinder having a porous rigid material which the substrate to be treated rests on during operation. The device is configured to deliver, during operation, treating liquid via the interior of the hollow cylinder of the at least one support roller through the porous rigid material to the external surface of the hollow cylinder in order to treat at least one surface of the substrate by the treating liquid. The device is configured to treat several substrates in the form of plate-shaped separate wafers arranged one behind the other and/or next to one another in the device, by the treating liquid and to transport the substrates in a transport plane during the treatment.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: July 13, 2021
    Assignee: SINGULUS TECHNOLOGIES AG
    Inventors: Jens Eckstein, Peter Reustle, Mathias Hohlmayer, Uemit Seyhan, Benjamin Mandlmeier, Michael Reising, Stefan Kempf, Jan-Christof Jacobi
  • DEVICE AND METHOD FOR TREATING SUBSTRATES USING A SUPPORT ROLLER HAVING A POROUS MATERIAL
    Publication number: 20190122914
    Abstract: A device for treating substrates by a treating liquid has at least one rotatably supported support roller which a substrate to be treated rests on during operation. The support roller has a hollow cylinder having a porous rigid material which the substrate to be treated rests on during operation. The device is configured to deliver, during operation, treating liquid via the interior of the hollow cylinder of the at least one support roller through the porous rigid material to the external surface of the hollow cylinder in order to treat at least one surface of the substrate by the treating liquid. The device is configured to treat several substrates in the form of plate-shaped separate wafers arranged one behind the other and/or next to one another in the device, by the treating liquid and to transport the substrates in a transport plane during the treatment.
    Type: Application
    Filed: December 17, 2018
    Publication date: April 25, 2019
    Inventors: Jens ECKSTEIN, Peter REUSTLE, Mathias HOHLMAYER, Uemit SEYHAN, Benjamin MANDLMEIER, Michael REISING, Stefan KEMPF, Jan-Christof JACOBI