Patents by Inventor Peter Richard Badowski

Peter Richard Badowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Removal of transition metal ternary and/or quaternary barrier materials from a substrate
    Patent number: 7371688
    Abstract: A process for the selective removal of a substance from a substrate for etching and/or cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a substance from a substrate comprising: providing the substrate having the substance deposited thereupon wherein the substance comprises a transition metal ternary compound, a transition metal quaternary compound, and combinations thereof; reacting the substance with a process gas comprising a fluorine-containing gas and optionally an additive gas to form a volatile product; and removing the volatile product from the substrate to thereby remove the substance from the substrate.
    Type: Grant
    Filed: September 15, 2004
    Date of Patent: May 13, 2008
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Bing Ji, Martin Jay Plishka, Dingjun Wu, Peter Richard Badowski, Eugene Joseph Karwacki, Jr.