Abstract: A transfer device includes first and second transfer members which are movable into a first transfer state on opposite sides of a first transfer plane (P1). The first transfer member includes first magnetic field sources that form a first magnetic field array for retaining the tire component with a first magnetic attraction force (F1), while the second transfer member includes second magnetic field sources that form a second magnetic field array for retaining the tire component with a second magnetic attraction force (F2) that is larger than the first magnetic attraction force (F1) at the first transfer plane (P1), wherein in the first transfer state the second magnetic field array is offset with respect to the first magnetic field array.

Abstract: A transfer device includes first and second transfer members which are movable into a first transfer state on opposite sides of a first transfer plane (P1). The first transfer member includes first magnetic field sources that form a first magnetic field array for retaining the tire component with a first magnetic attraction force (F1), while the second transfer member includes second magnetic field sources that form a second magnetic field array for retaining the tire component with a second magnetic attraction force (F2) that is larger than the first magnetic attraction force (F1) at the first transfer plane (P1), wherein in the first transfer state the second magnetic field array is offset with respect to the first magnetic field array.

Abstract: A linear seal seals over a slot formed in a wall of a vacuum chamber of a lithographic projection apparatus. The linear seal includes an elongate sealing member which is locally displaced from the slot at a selectable position such that conduits may pass from outside of the vacuum chamber to the inside of the vacuum chamber at the local displacement of the elongate sealing member.

Abstract: A suspension system for suspending a laser discharge unit (LDU) is provided herein. The suspension system includes steel W-springs instead of rubber blocks. The new design increases long time position stability and position accuracy after remounting of the LDU. Further isolation of vibrations caused by the fan of the LDU to the optics frame is increased, too. With the new steel W-spring suspension the maximum amplitudes of the vibrations are a factor 2.5 till 6 lower than with the rubber block suspension.

Abstract: A linear seal seals over a slot formed in a wall of a vacuum chamber of a lithographic projection apparatus. The linear seal includes an elongate sealing member which is locally displaced from the slot at a selectable position such that conduits may pass from outside of the vacuum chamber to the inside of the vacuum chamber at the local displacement of the elongate sealing member.