Abstract: A method for manufacturing a membrane assembly for EUV lithography, the method including: providing a stack including: at least one membrane layer supported by a planar substrate, wherein the planar substrate has an inner region and a border region around the inner region; and a first sacrificial layer between the planar substrate and the membrane layer; selectively removing the inner region of the planar substrate such that the membrane assembly has: a membrane formed from the at least one membrane layer, and a border holding the membrane, the border having the border region of the planar substrate and the first sacrificial layer situated between the border region and the membrane layer, wherein the selectively removing the inner region of the planar substrate includes using an etchant which has a similar etch rate for the membrane layer and its oxide and a substantially different etch rate for the first sacrificial layer.

Abstract: The present invention is directed to the discovery that RapI-GTP, Rac1-GTP and Flt3-L can be used as Biomarkers for the early detection of sepsis in patients suspected of a bacterial infection which presents as sepsis or is likely to produce sepsis. In particular, the present invention is directed to methods, assays and kits which may be used to distinguish sepsis (infection) from systematic inflammatory response caused by sterile inflammation in trauma patients. The method may be used to diagnose bacteria infection and/or sepsis and monitor therapy of a patient to allow modification of treatment and/or cessation of treatment.

Abstract: Methods and systems for managing permission controls are disclosed. A method can comprise receiving a request to perform one or more restricted activities. The request can include at least an identifier of a first user associated with the request and an identification of the one or more restricted activities. The identifier of the first user associated with the request and/or the identification of the one or more restricted activities can be presented to a second user, such as an administrator. A response to the request can be provided by the second user and transmitted comprising information relating to one or more of a grant, denial, or modification of the performance of the one or more restricted activities. The transmitted response can be configured to be processed by the source to effect grant, denial, or modification of the performance of the one or more restricted activities.

Abstract: A pellicle assembly includes a pellicle frame defining a surface onto which a pellicle is, or to be, attached. The pellicle assembly includes one or more three-dimensional expansion structures that allow the pellicle to expand under stress. A pellicle assembly for a patterning device, the pellicle assembly includes one or more actuators for moving the pellicle assembly towards and way from the patterning device.

Abstract: A method for manufacturing a membrane assembly for EUV lithography, the method including: providing a stack including: at least one membrane layer supported by a planar substrate, wherein the planar substrate has an inner region and a border region around the inner region; and a first sacrificial layer between the planar substrate and the membrane layer; selectively removing the inner region of the planar substrate such that the membrane assembly has: a membrane formed from the at least one membrane layer, and a border holding the membrane, the border having the border region of the planar substrate and the first sacrificial layer situated between the border region and the membrane layer, wherein the selectively removing the inner region of the planar substrate includes using an etchant which has a similar etch rate for the membrane layer and its oxide and a substantially different etch rate for the first sacrificial layer.

Abstract: Methods and systems for managing permission controls are disclosed. A method can comprise receiving a request to perform one or more restricted activities. The request can include at least an identifier of a first user associated with the request and an identification of the one or more restricted activities. The identifier of the first user associated with the request and/or the identification of the one or more restricted activities can be presented to a second user, such as an administrator. A response to the request can be provided by the second user and transmitted comprising information relating to one or more of a grant, denial, or modification of the performance of the one or more restricted activities. The transmitted response can be configured to be processed by the source to effect grant, denial, or modification of the performance of the one or more restricted activities.

Abstract: Aspects of this technical solution can generate, according to a lag time window based at least in part on a first plurality of features, a second data set via aggregation of compatible fields in the first data set, the first plurality of features corresponding to a first data set, augment the first plurality of features extracted from the first data set with a second plurality of features extracted from a third data set, the third data set corresponding to a join of the first data set and the second data set, update, via machine learning and according to a rate corresponding to the data set, a model with the third plurality of features, and instruct a user interface to present at least one performance of the model with the third plurality of features, according to the rate.

Abstract: A pellicle assembly includes a pellicle frame defining a surface onto which a pellicle is, or to be, attached. The pellicle assembly includes one or more three-dimensional expansion structures that allow the pellicle to expand under stress. A pellicle assembly for a patterning device, the pellicle assembly includes one or more actuators for moving the pellicle assembly towards and way from the patterning device.

Abstract: A system for automatically stopping an autonomous vehicle, in which the autonomous vehicle includes a primary brake and a secondary brake controlled by least one control module or different control modules. The system includes: an error detection module configured to detect an error in the control of the primary brake or the secondary brake by the one control module or the different control modules; and a supplemental control module configured, upon a detected error by the error module, to cause a stop of the autonomous vehicle using the primary brake or the secondary brake.

Abstract: A system and methods of matching activity, specialized personnel, transport vehicle to Nursing home type clients for non-emergency services upon request, including an Interface Independent database, one or a series of intelligent Billing modules that compute various data combinations and accurately bills for the service for prepayment, considering other sources of contributions like Medicare and Medicaid, promotions, discounts and other related cost deflators.

Abstract: The invention relates to a pellicle assembly comprising a pellicle frame defining a surface onto which a pellicle is attached. The pellicle assembly comprises one or more three-dimensional expansion structures that allow the pellicle to expand under stress. The invention also relates to a pellicle assembly for a patterning device comprising one or more actuators for moving the pellicle assembly towards and way from the patterning device.

Abstract: The invention concerns a device for use in ligament surgery to locate the best graft attachment site, including parts thereof; a kit of parts for use in ligament surgery; and a method for performing ligament surgery.

Abstract: A system for automatically stopping an autonomous vehicle, in which the autonomous vehicle includes a primary brake and a secondary brake controlled by least one control module or different control modules. The system includes: an error detection module configured to detect an error in the control of the primary brake or the secondary brake by the one control module or the different control modules; and a supplemental control module configured, upon a detected error by the error module, to cause a stop of the autonomous vehicle using the primary brake or the secondary brake.

Abstract: The utility model relates to a structural arrangement for attaching flexible uppers to sandals such as flip-flops, consisting of an upper (2) comprising three longitudinal straps (7, 8 and 9) provided with, in the most distal regions thereof, an upper protuberance (10) in contact with an upper surface (5) of a sole (1), a lower protuberance (11) in contact with a lower surface (6) of said sole (1), and a hollow space (12) that passes through cavities (4) in the sole (1) and receives a stopper (3) made of rigid plastic, said stopper having both a region with a smaller diameter (13) and a region with a larger diameter (14), the latter covering the lower recess (11) of the most distal end of the upper (2), as well as a central hole (15) that connects the inside of the hollow space to the outside environment.

Abstract: The invention relates to a pellicle assembly comprising a pellicle frame defining a surface onto which a pellicle is attached. The pellicle assembly comprises one or more three-dimensional expansion structures that allow the pellicle to expand under stress. The invention also relates to a pellicle assembly for a patterning device comprising one or more actuators for moving the pellicle assembly towards and way from the patterning device.

Abstract: A method for manufacturing a membrane assembly for EUV lithography, the method including: providing a stack including: at least one membrane layer supported by a planar substrate, wherein the planar substrate has an inner region and a border region around the inner region; and a first sacrificial layer between the planar substrate and the membrane layer; selectively removing the inner region of the planar substrate such that the membrane assembly has: a membrane formed from the at least one membrane layer, and a border holding the membrane, the border having the border region of the planar substrate and the first sacrificial layer situated between the border region and the membrane layer, wherein the selectively removing the inner region of the planar substrate includes using an etchant which has a similar etch rate for the membrane layer and its oxide and a substantially different etch rate for the first sacrificial layer.

Abstract: A pellicle assembly is disclosed that has a pellicle frame defining a surface onto which a pellicle is to be attached. The pellicle assembly includes one or more three-dimensional expansion structures that allow the pellicle to expand under stress. There is also disclosed a pellicle assembly for a patterning device, the pellicle assembly including one or more actuators for moving the pellicle assembly towards and way from the patterning device.

Abstract: A drive with integrated dynamic load control includes a three-phase asynchronous motor having three phase legs connected in a star circuit, each phase leg having a winding having a coil end connected to a common star point. A load control circuit has a regulating module, an ammeter, a voltmeter and first and second switches. The ammeter and voltmeter detect a phase current and a phase voltage in one phase leg. The regulating module calculates an active power of the phase leg and a total active power of the motor responsive to the phase current and phase voltage. The switches are arranged in two of the phase legs between the respective coil end and the star point and the regulating module interrupts the two phase legs by using the switches when the active power, the total active power or a torque calculated from the total active power exceeds an adjustable limit value.

Abstract: The present invention is directed to the discovery that RapI-GTP, Racl-GTP and Flt3-L can be used as Biomarkers for the early detection of sepsis in patients suspected of a bacterial infection which presents as sepsis or is likely to produce sepsis. In particular, the present invention is directed to methods, assays and kits which may be used to distinguish sepsis (infection) from systematic inflammatory response caused by sterile inflammation in trauma patients. The method may he used to diagnose bacteria infection and/or sepsis and monitor therapy of a patient to allow modification of treatment and/or cessation of treatment.