Patents by Inventor Peter Skuk
Peter Skuk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10502466Abstract: An evaporator contains a heating tube, a heat exchanger for cooling the heating tube, and a means for generating an aerosol. The heat exchanger contains at least two cooling pipes, where the at least two cooling pipes are arranged such that each of the at least two cooling pipes is in physical contact with the heating tube. The means for generating the aerosol is coupled to the at least two cooling pipes.Type: GrantFiled: October 23, 2018Date of Patent: December 10, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Gerd Hoffmann, Peter Skuk
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Patent number: 10215457Abstract: A heat exchanger for cooling a heating tube is described, comprising at least two cooling pipes, wherein the at least two cooling pipes are arranged such that each of the at least two cooling pipes are configured to be in thermal contact with the heating tube; and a means for generating an aerosol being configured to provide the aerosol in the at least two cooling pipes.Type: GrantFiled: December 9, 2011Date of Patent: February 26, 2019Assignee: Applied Materials, Inc.Inventors: Gerd Hoffmann, Peter Skuk
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Publication number: 20190056157Abstract: An evaporator contains a heating tube, a heat exchanger for cooling the heating tube, and a means for generating an aerosol. The heat exchanger contains at least two cooling pipes, where the at least two cooling pipes are arranged such that each of the at least two cooling pipes is in physical contact with the heating tube. The means for generating the aerosol is coupled to the at least two cooling pipes.Type: ApplicationFiled: October 23, 2018Publication date: February 21, 2019Inventors: Gerd HOFFMANN, Peter SKUK
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Publication number: 20150128641Abstract: A heat exchanger for cooling a heating tube is described, comprising at least two cooling pipes, wherein the at least two cooling pipes are arranged such that each of the at least two cooling pipes are configured to be in thermal contact with the heating tube; and a means for generating an aerosol being configured to provide the aerosol in the at least two cooling pipes.Type: ApplicationFiled: December 9, 2011Publication date: May 14, 2015Applicant: Applied Materials, Inc.Inventors: Gerd Hoffmann, Peter Skuk
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Patent number: 8591223Abstract: An evaporator for vaporizing an organic material to be deposited on a flexible substrate where the evaporator includes an evaporation tube having a wall encompassing a cavity for vaporizing the organic material, at least one heating device arranged adjacent to the wall and being adapted to heat the evaporation tube, and at least one nozzle assembly protruding from the evaporation tube. The nozzle assembly further comprises a nozzle cover with an opening, and a shutter for selectively opening and closing the opening of the nozzle cover. The shutter is adapted to have in operation of the evaporation tube a temperature within a shutter temperature range of 140° C. such that the temperature of the nozzle cover is within the shutter temperature range.Type: GrantFiled: September 30, 2008Date of Patent: November 26, 2013Assignee: Applied Materials, Inc.Inventors: Stefan Hein, Gerd Hoffmann, Peter Skuk
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Patent number: 7882946Abstract: A guide arrangement (1) for guiding webs in evacuatable web treatment installations comprises at least one guide roller (2) with an axis (5), whose spatial position is settable. To solve the problem of compensating in modular installations with several chambers either misalignments of the chambers relative to one another and/or to avoid completely adjustable roller frames, whose adjustment would require the repositioning of treatment and coating sources and of separating gaps on the circumference of coating rollers, the invention proposes that the guide roller (2) is supported between two pivot bearings (11, 12), of which at least one is adjustable relative to the other transversely to the axis (5). This is preferably carried out thereby that the adjustable pivot bearing (12) comprises a slide guide (15), fastened to a chamber wall (14), on which a slide (16) with the pivot bearing (12) is guided, and that the adjustable pivot bearing (12) comprises a remotely operated adjustment drive (21).Type: GrantFiled: March 17, 2005Date of Patent: February 8, 2011Assignee: Applied Materials GmbH & Co. KGInventors: Stefan Hein, Peter Skuk, Karl-Heinz Wenk, Reiner Kukla, Rainer Ludwig
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Publication number: 20100297361Abstract: A plasma deposition source for transferring a deposition gas into a plasma phase and for depositing, from the plasma phase, a thin film onto a substrate moving in a substrate transport direction in a vacuum chamber is described. The plasma deposition source includes a multi-region electrode device adapted to be positioned in the vacuum chamber and including at least one RF electrode arranged opposite to the moving substrate, and an RF power generator adapted for supplying RF power to the RF electrode. The RF electrode has at least one gas inlet arranged at one edge of the RF electrode and at least one gas outlet arranged at the opposed edge of the RF electrode. A normalized plasma volume is provided by a plasma volume defined between an electrode surface and an opposite substrate position, divided by an electrode length. The normalized plasma volume is tuned to a depletion length of the deposition gas.Type: ApplicationFiled: June 2, 2009Publication date: November 25, 2010Applicant: APPLIED MATERIALS, INC.Inventors: Neil MORRISON, Andre HERZOG, Stefan HEIN, Peter SKUK
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Publication number: 20100266766Abstract: According to embodiments described herein, a guiding device for contactless guiding of a web in a web coating process under vacuum conditions is provided. The guiding device includes a curved surface for facing the web and a group of gas outlets disposed in the curved surface and adapted for giving off a gas flow to form a hover cushion between the curved surface and the web. The guiding device further includes a gas distribution system for selectively providing the gas flow to a first subgroup of the gas outlets and for preventing the gas from flowing to a second subgroup of the gas outlets.Type: ApplicationFiled: April 21, 2009Publication date: October 21, 2010Inventors: Stefan Hein, Andre Herzog, Peter Skuk, John D. Busch
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Publication number: 20100081104Abstract: An evaporator for vaporizing an organic material to be deposited on a flexible substrate where the evaporator includes an evaporation tube having a wall encompassing a cavity for vaporizing the organic material, at least one heating device arranged adjacent to the wall and being adapted to heat the evaporation tube, and at least one nozzle assembly protruding from the evaporation tube. The nozzle assembly further comprises a nozzle cover with an opening, and a shutter for selectively opening and closing the opening of the nozzle cover. The shutter is adapted to have in operation of the evaporation tube a temperature within a shutter temperature range of 140° C. such that the temperature of the nozzle cover is within the shutter temperature range.Type: ApplicationFiled: September 30, 2008Publication date: April 1, 2010Applicant: APPLIED MATERIALS, INC.Inventors: STEFAN HEIN, GERD HOFFMANN, PETER SKUK
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Patent number: 7594970Abstract: A web coating apparatus with a vacuum chamber (1) has between a rear wall (18) and at least one removable closing plate (22), housing member (20) with a planar cover (10), and at least one guide roll (12, 13, 14, 15) and a coating cylinder (9) with an axle (A) and at least one coating source (39a, 39b, 39c) are arranged in the vacuum chamber (1). To reduce structural height and width and to achieve an easily viewable and controllable web path while avoiding particle formation in the reach of the coating cylinder (9), provision is made pursuant to the invention that the ends of the at least one guide roll (12, 13, 14, 15) and of the coating cylinder are affixed by supporting elements (16, 17 and 19) with bearings to the cover (10) and that the cavity in the vacuum chamber (1) under the coating cylinder (9) is kept free of supporting elements.Type: GrantFiled: February 23, 2004Date of Patent: September 29, 2009Assignee: Applied Materials GmbH & Co. KGInventors: Stefan Hein, Peter Skuk
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Publication number: 20090032196Abstract: The invention relates to an arrangement for changing a winding drum in a take-up or feed-out chamber of a coating installation for web-form material. One such arrangement can be provided on both sides of a coating chamber, the one arrangement serving as a take-up drum and the other arrangement as a feed-out drum. The arrangement comprises two tracks for receiving end bearings of a winding drum, the tracks being comprised of two parts, of which the one part is stationary and the other is pivotable. The arrangement is located in a housing with a door. If the winding drum is to be replaced, the door is opened and the pivotable parts of the tracks are folded outwardly such that they project from the housing. Onto the projecting track parts a winding drum can now be placed, it can subsequently be slid inwardly and be arrested.Type: ApplicationFiled: November 30, 2007Publication date: February 5, 2009Inventors: Peter Skuk, Karl-Heinrich Wenk, Richard Klaus
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Patent number: 7450233Abstract: A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.Type: GrantFiled: November 24, 2004Date of Patent: November 11, 2008Assignee: Applied Materials GmbH & Co. KGInventors: Hans-Georg Lotz, Peter Sauer, Stefan Hein, Peter Skuk
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Publication number: 20060291825Abstract: The invention relates to an arrangement for vaporizing materials with a vaporizer crucible, in which is disposed the material to be vaporized. About the vaporizer crucible is placed a vaporizer tube, which, seen in the longitudinal direction of the vaporizer tube, comprises at least two heating circuits, spatially disposed one after the other and electrically controllable separately. Each of these heating circuits comprises at least two heating subcircuits, of which on is disposed on one side of the vaporizer tube and one on the other side of the vaporizer tube. The vaporizer tube is provided with a top portion which has its own heating circuit.Type: ApplicationFiled: December 13, 2004Publication date: December 28, 2006Inventors: Stefan Hein, Gunter Klemm, Peter Skuk
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Publication number: 20060192964Abstract: A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.Type: ApplicationFiled: November 24, 2004Publication date: August 31, 2006Inventors: Hans-Georg Lotz, Peter Sauer, Stefan Hein, Peter Skuk
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Publication number: 20060011769Abstract: The invention relates to an arrangement for changing a winding drum in a take-up or feed-out chamber of a coating installation for web-form material. One such arrangement can be provided on both sides of a coating chamber, the one arrangement serving as a take-up drum and the other arrangement as a feed-out drum. The arrangement comprises two tracks for receiving end bearings of a winding drum, the tracks being comprised of two parts, of which the one part is stationary and the other is pivotable. The arrangement is located in a housing with a door. If the winding drum is to be replaced, the door is opened and the pivotable parts of the tracks are folded outwardly such that they project from the housing. Onto the projecting track parts a winding drum can now be placed, it can subsequently be slid inwardly and be arrested.Type: ApplicationFiled: December 7, 2004Publication date: January 19, 2006Inventors: Peter Skuk, Karl-Heinrich Wenk, Richard Klaus
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Publication number: 20050224551Abstract: A guide arrangement (1) for guiding webs in evacuatable web treatment installations comprises at least one guide roller (2) with an axis (5), whose spatial position is settable. To solve the problem of compensating in modular installations with several chambers either misalignments of the chambers relative to one another and/or to avoid completely adjustable roller frames, whose adjustment would require the repositioning of treatment and coating sources and of separating gaps on the circumference of coating rollers, the invention proposes that the guide roller (2) is supported between two pivot bearings (11, 12), of which at least one is adjustable relative to the other transversely to the axis (5). This is preferably carried out thereby that the adjustable pivot bearing (12) comprises a slide guide (15), fastened to a chamber wall (14), on which a slide (16) with the pivot bearing (12) is guided, and that the adjustable pivot bearing (12) comprises a remotely operated adjustment drive (21).Type: ApplicationFiled: March 17, 2005Publication date: October 13, 2005Inventors: Stefan Hein, Peter Skuk, Karl-Heinz Wenk, Reiner Kulka, Rainer Ludwig
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Publication number: 20050172898Abstract: A web coating apparatus with a vacuum chamber (1) has between a rear wall (18) and at least one removable closing plate (22), housing member (20) with a planar cover (10), and at least one guide roll (12, 13, 14, 15) and a coating cylinder (9) with an axle (A) and at least one coating source (39a, 39b, 39c) are arranged in the vacuum chamber (1). To reduce structural height and width and to achieve an easily viewable and controllable web path while avoiding particle formation in the reach of the coating cylinder (9), provision is made pursuant to the invention that the ends of the at least one guide roll (12, 13, 14, 15) and of the coating cylinder are affixed by supporting elements (16, 17 and 19) with bearings to the cover (10) and that the cavity in the vacuum chamber (1) under the coating cylinder (9) is kept free of supporting elements.Type: ApplicationFiled: February 23, 2004Publication date: August 11, 2005Inventors: Stefan Hein, Peter Skuk