Abstract: A substrate support constructed to support a substrate for immersion lithographic processing is disclosed. The substrate support has a central part and a peripheral part, the peripheral part comprising an extraction duct configured to extract a liquid from a top surface of the substrate support, the extraction duct connected to an exit duct configured to duct the liquid away from the substrate support. The substrate support further includes a thermal stabilizer, arranged in the peripheral part, configured to thermally stabilize a central part of the substrate support relative to the peripheral part.

Abstract: A lithographic apparatus for immersion lithography is disclosed in which a seal between different parts of the substrate table may be arranged to reduce the transmission of forces between the different parts.

Abstract: In an immersion lithographic apparatus, bubble formation in immersion liquid is reduced or prevented by reducing a gap size or area on a substrate table and/or covering the gap.

Abstract: Lithographic Apparatus and Device Manufacturing Method In an immersion lithographic apparatus, bubble formation in immersion liquid is reduced or prevented by reducing a gap size or area on a substrate table and/or covering the gap.

Abstract: A lithographic apparatus is disclosed in which a circular sensor is mounted to a substrate table with three leaf springs that are evenly spaced around a thermal axis of the sensor. The leaf springs are provided in two parts that are releasably attachable to each other. The leaf springs are elastic and allow some movement of the sensor relative to the substrate table on thermal expansion and contraction but ensure that the thermal center of the sensor does not move relative to the substrate table.

Abstract: A lithographic apparatus for immersion lithography is disclosed in which a seal between different parts of a substrate table is arranged to be easily applied and removed and in an embodiment, reduces transmission of forces between the different parts.

Abstract: A valve assembly (10) able to be mounted with a liquid container, the valve assembly comprising: a housing (20) having a passageway (60) that extends through the housing; a breather float valve (80) mounted within the housing, the breather float valve movable between an open position to allow gas to pass through the passageway and a closed position that prevents liquid from passing through the passageway; a liquid inlet (30), forming part of the housing, the liquid inlet allowing fluid to pass into the housing; and an inlet float valve (41) mounted within the housing, the inlet float valve movable between an open position that permits the flow of liquid through the liquid inlet and a closed position that prevents the flow of fluid through the liquid inlet.

Abstract: A lithographic apparatus for immersion lithography is disclosed in which a seal between different parts of the substrate table may be arranged to reduce the transmission of forces between the different parts.

Abstract: In an immersion lithographic apparatus, a closing plate is used to contain liquid in a liquid confinement structure while, for example, substrates are swapped on a substrate table. A closing plate displacement mechanism using, for example, a combination of one or more leaf springs and one or more electromagnets or a combination of one or more linear actuators and one more pins, is used to moving the closing plate toward or from the liquid confinement structure. In an embodiment, an adjustment plate is used to compensate for closing plates of varying thickness in closing plate receptacles of varying depth on different substrate tables.

Abstract: A three phase linear motor system includes a forcer having three pole pairs, which are moveable relative to a platen. The pole pairs are arranged to oppose associated teeth of the platen. The platen teeth are spaced apart from each other in a travel direction according to a predefined tooth pitch. Each of the pole pairs includes a set of teeth that extend from magnetically coupled poles toward the platen. The set of teeth of one of the pole pairs is spaced from the sets of teeth for the other two poles by distances functionally related to about 120 degrees and 240 degrees, respectively, of the tooth pitch.

Abstract: A three phase linear motor system includes a forcer having three pole pairs, which are moveable relative to a platen. The pole pairs are arranged to oppose associated teeth of the platen. The platen teeth are spaced apart from each other in a travel direction according to a predefined tooth pitch. Each of the pole pairs includes a set of teeth that extend from magnetically coupled poles toward the platen. The set of teeth of one of the pole pairs is spaced from the sets of teeth for the other two poles by distances functionally related to about 120 degrees and 240 degrees, respectively, of the tooth pitch.

Abstract: Power requirements for a robotic system are achieved through the employment of modular-type linear motor (LM) cells of either the one dimensional or two-dimensional type. Increasing system power requirements are met through the utilization of an increasing number of modular linear motor cells precisely positioned upon a common mounting plate to assure proper operation with a common platen.

Abstract: Surface treating apparatus employing at least two linear motors driving a multiple linkage system for positioning the outlet of treatment apparatus such as a radiation head or a sprayer for coating objects and especially large objects. A combination of different motions such as linear, rotational and a combination thereof are achieved through varying relative speeds and/or selective movements of the linear motors used to drive the multiple linkage system. Treatment of the entire surface area of the item being treated is accomplished through with the number of reduced number of components of simplified design. One dimensional and two dimensional linear motors may be employed in the system. A second embodiment has a plurality of spray assemblies. Each assembly has a single arm and linear motor which moves along two perpendicular axes.