Abstract: Aspects of the present disclosure are directed to force sensors. As may be implemented in accordance with one or more embodiments, an apparatus includes a force-responsive component having a resonant frequency, and a circuit that compensates for variations with the force-responsive component. The force-responsive component moves in response to an applied force, in accordance with a spring constant that is susceptible to fluctuation. The compensation circuit determines Brownian motion of the force-responsive component at the resonant frequency based on temperature, and generates an output based on the determined Brownian motion and movement of the force-responsive component. Such an output is indicative of force applied to the apparatus.

Abstract: Aspects of the present disclosure are directed toward apparatuses, methods, and systems that include at least two regions of a first semiconductor material and at least two regions of second semiconductor material that are alternatively interleaved. Additionally, the apparatuses, methods, and systems include a first electrode and a second electrode that can operate both as a source and drain. The apparatuses, methods, and systems also include a first gate electrode having multiple portions on the first semiconductor material and a second gate electrode having multiple portions on the second semiconductor material that bidirectionally control current flow between the first electrode and the second electrode.

Abstract: Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.

Abstract: A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The capacitances associated with the inner electrode and the outer electrode are independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time.

Abstract: Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.

Abstract: Aspects of the present disclosure are directed toward apparatuses, methods, and systems that include at least two regions of a first semiconductor material and at least two regions of second semiconductor material that are alternatively interleaved. Additionally, the apparatuses, methods, and systems include a first electrode and a second electrode that can operate both as a source and drain. The apparatuses, methods, and systems also include a first gate electrode having multiple portions on the first semiconductor material and a second gate electrode having multiple portions on the second semiconductor material that bidirectionally control current flow between the first electrode and the second electrode.

Abstract: Aspects of the present disclosure are directed to force sensors. As may be implemented in accordance with one or more embodiments, an apparatus includes a force-responsive component having a resonant frequency, and a circuit that compensates for variations with the force-responsive component. The force-responsive component moves in response to an applied force, in accordance with a spring constant that is susceptible to fluctuation. The compensation circuit determines Brownian motion of the force-responsive component at the resonant frequency based on temperature, and generates an output based on the determined Brownian motion and movement of the force-responsive component. Such an output is indicative of force applied to the apparatus.

Abstract: A resonator device (200) comprises a base (206) comprising an anchor (204) and a vibration unit (212) connected to the anchor (204). The vibration unit (212) is configured to have a first vibration mode (218) and a second vibration mode (216) different from the first vibration mode (218). According to an embodiment, the vibration unit (212) is configured such that the first vibration mode (218) and the second vibration mode (216) destructively interfere at the anchor (204).

Abstract: A frequency selection device comprises an oscillator, which comprises a resonator mass which is connected by a spring arrangement to a substrate, and a piezoresistive element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected to the resonator mass. A current is driven through the piezoresistive element to control oscillation of the resonator mass. An input is provided for coupling a signal from which a desired frequency range is to be selected, to the resonator mass; and a detector is used for detecting a signal amplified by the oscillator.

Abstract: In one embodiment, a device includes a first IC having a differential signal driver and a first isolation circuit configured to provide differential signals transmitted by the differential signal driver to a first pair of bond pads of the first IC. First and second bond wires are configured to provide differential signals from the first pair of bond pads to a second pair of bond pad included in a second IC. The second IC includes a second isolation circuit configured to provide differential signals from the second pair of bond pads to a differential receiver circuit of the second IC. The bond wires are specifically arranged such that a distance between the first and second bond wires varies by at least 10% as measured at two points along a length of the first bond wire.

Abstract: A switching circuit employs MEMS devices. In connection with various example embodiments, signal switching circuit couples primary and secondary data link connectors having at least two channels and an electrode for each channel. A MEMS switch is coupled to each channel in of the secondary data link connectors, and includes a suspended membrane, first and second contact electrodes (one being in the membrane) and a biasing circuit that biases the membrane for moving the membrane between open and closed positions to contact the electrodes. A switch controller circuit selectively controls the application of an actuation voltage to each of the biasing circuits, thereby selectively actuating the membranes between the open and closed positions for routing signals between the primary and secondary data link connectors.

Abstract: A resonator has a vibrating element (10) and at least a first (20) and a second (30) electrode, at least one of the electrodes storing an electric charge to make the device charge biased. A charge adjuster (C) can add to or reduce the stored charge. The charge adjuster can be a capacitor to reduce leakage, and or a power supply coupled by switch. It can reduce problems of stiction, and reduce power consumption, and reduce non linearity's, it enables the charge level to be adjusted before operation. A second switch can be used to ground the vibrating element.

Abstract: A resonator device (200) comprises a base (206) comprising an anchor (204) and a vibration unit (212) connected to the anchor (204). The vibration unit (212) is configured to have a first vibration mode (218) and a second vibration mode (216) different from the first vibration mode (218). According to an embodiment, the vibration unit (212) is configured such that the first vibration mode (218) and the second vibration mode (216) destructively interfere at the anchor (204).

Abstract: A frequency selection device comprises an oscillator, which comprises a resonator mass which is connected by a spring arrangement to a substrate, and a piezoresistive element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected to the resonator mass. A current is driven through the piezoresistive element to control oscillation of the resonator mass. An input is provided for coupling a signal from which a desired frequency range is to be selected, to the resonator mass; and a detector is used for detecting a signal amplified by the oscillator.

Abstract: A resonator has a vibrating element (10) and at least a first (20) and a second (30) electrode, at least one of the electrodes storing an electric charge to make the device charge biased. A charge adjuster (C) can add to or reduce the stored charge. The charge adjuster can be a capacitor to reduce leakage, and or a power supply coupled by switch. It can reduce problems of stiction, and reduce power consumption, and reduce non linearity's, it enables the charge level to be adjusted before operation. A second switch can be used to ground the vibrating element.

Abstract: The electromechanical transducer (1) for transducing an electrical input signal into an electrical output signal comprises a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20). The elastic deformation is dependent on the electrical input signal and is resonantly enhanced when the electrical input signal comprises a signal component changing substantially with a resonance frequency of the resonator element The electrical output signal is a function of the elastic deformation. The resonance frequency includes a nominal frequency at an operating temperature and a temperature dependent frequency deviation from the nominal frequency.

Abstract: The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components.