Patents by Inventor Peter STRUTZMANN

Peter STRUTZMANN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Spin chuck with in situ cleaning capability
    Patent number: 9968970
    Abstract: In a method and apparatus for processing wafer-shaped articles, a spin chuck is positioned inside a process chamber. The spin chuck is configured to hold a wafer-shaped article at a predetermined process position. A cover covers the spin chuck and is affixed to or integral with the spin chuck for rotation therewith. The cover has a central opening. A stationary nozzle assembly extends into the process chamber such that a discharge end of the stationary nozzle assembly passes through the central opening of the cover. The nozzle assembly comprises a rinse nozzle configured to direct rinse liquid radially outwardly of the nozzle assembly onto a downwardly-facing surface of the cover.
    Type: Grant
    Filed: December 4, 2015
    Date of Patent: May 15, 2018
    Assignee: LAM RESEARCH AG
    Inventors: Andreas Gleissner, Peter Strutzmann
  • SPIN CHUCK WITH IN SITU CLEANING CAPABILITY
    Publication number: 20170162427
    Abstract: In a method and apparatus for processing wafer-shaped articles, a spin chuck is positioned inside a process chamber. The spin chuck is configured to hold a wafer-shaped article at a predetermined process position. A cover covers the spin chuck and is affixed to or integral with the spin chuck for rotation therewith. The cover has a central opening. A stationary nozzle assembly extends into the process chamber such that a discharge end of the stationary nozzle assembly passes through the central opening of the cover. The nozzle assembly comprises a rinse nozzle configured to direct rinse liquid radially outwardly of the nozzle assembly onto a downwardly-facing surface of the cover.
    Type: Application
    Filed: December 4, 2015
    Publication date: June 8, 2017
    Inventors: Andreas GLEISSNER, Peter STRUTZMANN