Patents by Inventor Peter Theodorus Giesen

Peter Theodorus Giesen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20050134828
    Abstract: A lithographic apparatus includes an illumination system for providing a beam of radiation, an article support for supporting a flat article to be placed in a beam path of the beam of radiation on the article support, an electrostatic clamp for clamping the article against the article support by an electrostatic field during projection, and a recessed backfill gas feed arranged in the article support for feeding backfill gas to a backside of the article when supported by the article support. According to one aspect of the invention, the recessed backfill gas feed includes a shielding layer for shielding the backfill gas in the recessed backfill gas feed from the electrostatic field.
    Type: Application
    Filed: December 17, 2003
    Publication date: June 23, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Joost Ottens, Johannes Hubertus Moors, Peter Theodorus Giesen
  • Lithographic apparatus and device manufacturing method
    Publication number: 20050128459
    Abstract: A lithographic apparatus is disclosed. The lithographic apparatus includes an illumination system for providing a beam of radiation on a flat article to be placed in a beam path of the beam of radiation, and an article handler for handling the article during placement or removal of the article. The article handler includes an electrode and a dielectric layer in order to form an electrostatic clamp for electrostatically clamping the article.
    Type: Application
    Filed: December 15, 2003
    Publication date: June 16, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Erwin Zwet, Jan Elp, Johannes Hubertus Moors, Hendrik Neerhof, Joost Ottens, Adrianus Mathijs De Groof, Leo Wilhelmus Kuipers, Peter Theodorus Giesen, Marco Le Kluse