Patents by Inventor Peter Theodorus Maria Giesen
Peter Theodorus Maria Giesen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10114289Abstract: The invention is directed at an exposure head for use in an exposure apparatus for illuminating a surface, the exposure head comprising one or more radiative sources for providing one or more beams, an optical scanning unit arranged for receiving the one or more beams and for directing the beams towards the surface for impinging each of the beams on an impingement spot, a rotation actuating unit connected to the optical scanning unit for at least partially rotating the optical scanning unit, wherein the impingement spots of the one or more beams are scanned across the surface by said at least partial rotation of the optical scanning unit, wherein the optical scanning unit comprises a transmissive element including one or more facets for receiving the one or more beams and for outputting the beams after conveying thereof through the transmissive element, for displacing the beams upon said rotation of the transmissive element for enabling the scanning of the impingement spots.Type: GrantFiled: April 14, 2015Date of Patent: October 30, 2018Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNOInventors: Jacobus Hubertus Theodoor Jamar, Herman Hendrikus Maalderink, Erwin Rinaldo Meinders, Peter Theodorus Maria Giesen, Erwin John van Zwet, Henri Jacques Antoine Jean Starmans
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Publication number: 20170038690Abstract: The invention is directed at an exposure head for use in an exposure apparatus for illuminating a surface, the exposure head comprising one or more radiative sources for providing one or more beams, an optical scanning unit arranged for receiving the one or more beams and for directing the beams towards the surface for impinging each of the beams on an impingement spot, a rotation actuating unit connected to the optical scanning unit for at least partially rotating the optical scanning unit, wherein the impingement spots of the one or more beams are scanned across the surface by said at least partial rotation of the optical scanning unit, wherein the optical scanning unit comprises a transmissive element including one or more facets for receiving the one or more beams and for outputting the beams after conveying thereof through the transmissive element, for displacing the beams upon said rotation of the transmissive element for enabling the scanning of the impingement spots.Type: ApplicationFiled: April 14, 2015Publication date: February 9, 2017Inventors: Jacobus Hubertus Theodoor Jamar, Herman Hendrikus Maalderink, Erwin Rinaldo Meinders, Peter Theodorus Maria Giesen, Erwin John van Zwet, Henri Jacques Antoine Jean Starmans
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Patent number: 9383195Abstract: A method of obtaining information indicative of the topography of a surface of a flexible substrate, the method including directing a beam of radiation at the surface of the flexible substrate; and detecting changes in intensity distribution, or angle of reflection, of the beam of radiation after the beam of radiation has been reflected from the surface of the substrate to obtain information indicative of the topography of the surface of the flexible substrate.Type: GrantFiled: November 3, 2008Date of Patent: July 5, 2016Assignee: ASML NETHERLANDS B.V.Inventors: Wilhelmus Johannes Maria De Laat, Cheng-Qun Gui, Peter Theodorus Maria Giesen, Marcus Theodoor Wilhelmus Van Der Heijden, Erwin Rinaldo Meinders, Mária Péter
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Patent number: 8570491Abstract: According to one aspect, the invention provides a table for compensating deformation in flexible foils (1) The table comprises a supportive base (2) and a deformation compensation system (3). This system comprises a plurality of movable elements (4), supported by the base (2), wherein the movable elements form a surface for supporting the flexible foil. The movable elements comprise clamps (6) for clamping the foil (5). The movable elements (4) are individually movable parallel to the surface for supporting the foil, so as to stretch the clamped foil into a predefined shape. The table for compensating deformation in flexible foils may be used in a manufacturing process of flexible functional foils to compensate deformation of the foils during sequential patterning.Type: GrantFiled: February 27, 2009Date of Patent: October 29, 2013Assignee: Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNOInventors: Erwin Rinaldo Meinders, Maria Peter, Peter Theodorus Maria Giesen, Wilhelmus Johannes Maria de Laat
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Patent number: 8319174Abstract: An exposure pattern is written on a substrate, by scanning a light spot along a trajectory over the substrate and switching it on and off according to a desired pattern. Respective spot sizes of the light for illuminating the substrate in respective parts of the trajectory according to a geometry of the pattern. Respective pitch values between successive ones of the parts of the trajectory are selected, in relation to the spot size selected for the respective parts. The light spot is scanned over the substrate along the trajectory, with the selected pitch values between the trajectory parts and a position dependent spot size along the trajectory. In an embodiment a helical trajectory is used.Type: GrantFiled: July 15, 2008Date of Patent: November 27, 2012Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNOInventors: Erwin Rinaldo Meinders, Peter Theodorus Maria Giesen
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Publication number: 20120281192Abstract: A method of obtaining information indicative of the topography of a surface of a flexible substrate, the method including directing a beam of radiation at the surface of the flexible substrate; and detecting changes in intensity distribution, or angle of reflection, of the beam of radiation after the beam of radiation has been reflected from the surface of the substrate to obtain information indicative of the topography of the surface of the flexible substrate.Type: ApplicationFiled: November 3, 2008Publication date: November 8, 2012Applicants: TNO, ASML Netherlands B.V.Inventors: Wilhelmus Johannes Maria De Laat, Cheng-Qun Gui, Peter Theodorus Maria Giesen, Marcus Theodoor Wilhelmus Van Der Heijden, Erwin Rinaldo Meinders, Mária Péter
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Publication number: 20110261336Abstract: According to one aspect, the invention provides a table for compensating deformation in flexible foils (1) The table comprises a supportive base (2) and a deformation compensation system (3). This system comprises a plurality of movable elements (4), supported by the base (2), wherein the movable elements form a surface for supporting the flexible foil. The movable elements comprise clamps (6) for clamping the foil (5). The movable elements (4) are individually movable parallel to the surface for supporting the foil, so as to stretch the clamped foil into a predefined shape. The table for compensating deformation in flexible foils may be used in a manufacturing process of flexible functional foils to compensate deformation of the foils during sequential patterning.Type: ApplicationFiled: February 27, 2009Publication date: October 27, 2011Applicant: Nederlandse Organisatie voor toegepastnatuurwetenschappelijk onderzoek TNOInventors: Erwin Rinaldo Meinders, Maria Peter, Peter Theodorus Maria Giesen, Wilhelmus Johannes Maria Da Laat
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Patent number: 8029973Abstract: A carrier substrate is provided with a layer of PDMS and curing agent on one side of the carrier substrate. The PDMS and curing agent can be arranged to receive and adhere to a lithographic substrate. The carrier substrate can be dimensioned such that the combined carrier substrate and lithographic substrate may be handled by a conventional lithographic apparatus.Type: GrantFiled: November 24, 2008Date of Patent: October 4, 2011Assignee: ASML Netherlands B.V.Inventors: Wilhelmus Johannes Maria De Laat, Cheng-Qun Gui, Peter Theodorus Maria Giesen, Paulus Wilhelmus Leonardus Van Dijk, Erwin Rinaldo Meinders, Maria Peter
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Publication number: 20100195073Abstract: An exposure pattern is written on a substrate, by scanning a light spot along a trajectory over the substrate and switching it on and off according to a desired pattern. Respective spot sizes of the light for illuminating the substrate in respective parts of the trajectory according to a geometry of the pattern. Respective pitch values between successive ones of the parts of the trajectory are selected, in relation to the spot size selected for the respective parts. The light spot is scanned over the substrate along the trajectory, with the selected pitch values between the trajectory parts and a position dependent spot size along the trajectory. In an embodiment a helical trajectory is used.Type: ApplicationFiled: July 15, 2008Publication date: August 5, 2010Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNOInventors: Erwin Rinaldo Meinders, Peter Theodorus Maria Giesen
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Publication number: 20090170025Abstract: A carrier substrate is provided with a layer of PDMS and curing agent on one side of the carrier substrate. The PDMS and curing agent can be arranged to receive and adhere to a lithographic substrate. The carrier substrate can be dimensioned such that the combined carrier substrate and lithographic substrate may be handled by a conventional lithographic apparatus.Type: ApplicationFiled: November 24, 2008Publication date: July 2, 2009Applicant: ASML NETHERLANDS B.V.Inventors: Wilhelmus Johannes Maria DE LAAT, Cheng-Qun GUI, Peter Theodorus Maria GIESEN, Paulus Wilhelmus Leonardus VAN DIJK, Erwin Rinaldo MEINDERS, Maria PETER
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Patent number: 7245357Abstract: A lithographic apparatus is disclosed. The lithographic apparatus includes an illumination system for providing a beam of radiation on a flat article to be placed in a beam path of the beam of radiation, and an article handler for handling the article during placement or removal of the article. The article handler includes an electrode and a dielectric layer in order to form an electrostatic clamp for electrostatically clamping the article.Type: GrantFiled: December 15, 2003Date of Patent: July 17, 2007Assignee: ASML Netherlands B.V.Inventors: Erwin Van Zwet, Jan Van Elp, Johannes Hubertus Josephina Moors, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens, Adrianus Mathijs Maria De Groof, Leo Wilhelmus Maria Kuipers, Peter Theodorus Maria Giesen, Marco Le Kluse
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Patent number: 7088431Abstract: A lithographic apparatus includes an illumination system for providing a beam of radiation, an article support for supporting a flat article to be placed in a beam path of the beam of radiation on the article support, an electrostatic clamp for clamping the article against the article support by an electrostatic field during projection, and a recessed backfill gas feed arranged in the article support for feeding backfill gas to a backside of the article when supported by the article support. According to one aspect of the invention, the recessed backfill gas feed includes a shielding layer for shielding the backfill gas in the recessed backfill gas feed from the electrostatic field.Type: GrantFiled: December 17, 2003Date of Patent: August 8, 2006Assignee: ASML Netherlands B.V.Inventors: Joost Jeroen Ottens, Johannes Hubertus Josephina Moors, Peter Theodorus Maria Giesen