Abstract: A method of automated data acquisition for a transmission electron microscope, the method comprising: obtaining a reference image of a sample at a first magnification; for each of a first plurality of target locations identified in the reference image: steering an electron beam of the transmission electron microscope to the target location, obtaining a calibration image of the sample at a second magnification greater than the first magnification, and using image processing techniques to identify an apparent shift between an expected position of the target location in the calibration image and an observed position of the target location in the calibration image, training a non-linear model using the first plurality of target locations and the corresponding apparent shifts; based on the non-linear model, calculating a calibrated target location for a next target location; steering the electron beam to the calibrated target location and obtaining an image at a third magnification greater than the first magnifica

Abstract: Methods and systems for using dynamic data-driven detector tuning to investigate a sample with a charged particle microscopy system are disclosed herein. Methods and systems according to the present disclosure include acquiring sample data for a region of interest on the sample, and then determining one or more materials present in the region of interest. Once the materials are identified, a differentiation detector window is identified for the one or more materials, and the detector settings of a detector are adjusted such that the detector obtains information within the differentiation detector window. Thus, as the sample is subsequently scanned, the detector obtains an optimal range of information that is allows for efficient differentiation among the one or more materials.

Abstract: The disclosure relates to a method of imaging a specimen using a transmission charged particle microscope, said method comprising providing a specimen, and providing a charged particle beam and directing said charged particle beam onto said specimen for generating a flux of charged particles transmitted through the specimen. The method comprises the step of generating and recording a first energy filtered flux of charged particles transmitted through the specimen, wherein said first energy filtered flux of charged particles substantially consists of non-scattered and elastically scattered charged particles. The method as disclosed herein comprises the further step of generating and recording a second energy filtered flux of charged particles transmitted through the specimen, wherein said second energy filtered flux of charged particles substantially consists of inelastically scattered charged particles.