Patents by Inventor Peter Veltman

Peter Veltman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170309438
    Abstract: An electrostatic lens comprising a first conductive plate with a first aperture, a second conductive plate with a second aperture, the second aperture being substantially aligned with the first aperture, a voltage supply for supplying a first voltage to the first conductive plate and a second voltage to the second conductive plate, the first voltage being lower than the second voltage, and an insulating structure for separating the first conductive plate from the second conductive plate. The insulating structure comprises a first portion in contact with the first conductive plate and a second portion in contact with the second conductive plate, the first portion having an overhanging portion and the second portion having an indented portion at an edge of the insulating structure, so that a gap is formed between the overhanging portion and the second conductive plate.
    Type: Application
    Filed: June 26, 2017
    Publication date: October 26, 2017
    Inventors: Stijn Willem Herman Karel STEENBRINK, Johan Joost KONING, Peter VELTMAN
  • Patent number: 8198602
    Abstract: An electrostatic lens comprising a first conductive plate with a first aperture, a second conductive plate with a second aperture, the second aperture being substantially aligned with the first aperture, a voltage supply for supplying a first voltage to the first conductive plate and a second voltage to the second conductive plate, the first voltage being lower than the second voltage, and an insulating structure for separating the first conductive plate from the second conductive plate. The insulating structure comprises a first portion in contact with the first conductive plate and a second portion in contact with the second conductive plate, the first portion having an overhanging portion and the second portion having an indented portion at an edge of the insulating structure, so that a gap is formed between the overhanging portion and the second conductive plate.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: June 12, 2012
    Assignee: Mapper Lithography IP B.V.
    Inventors: Stijn Willem Herman Karel Steenbrink, Johan Joost Koning, Peter Veltman
  • Publication number: 20110216299
    Abstract: An electrostatic lens comprising a first conductive plate with a first aperture, a second conductive plate with a second aperture, the second aperture being substantially aligned with the first aperture, a voltage supply for supplying a first voltage to the first conductive plate and a second voltage to the second conductive plate, the first voltage being lower than the second voltage, and an insulating structure for separating the first conductive plate from the second conductive plate. The insulating structure comprises a first portion in contact with the first conductive plate and a second portion in contact with the second conductive plate, the first portion having an overhanging portion and the second portion having an indented portion at an edge of the insulating structure, so that a gap is formed between the overhanging portion and the second conductive plate.
    Type: Application
    Filed: March 31, 2011
    Publication date: September 8, 2011
    Applicant: Mapper Lithography IP B.V.
    Inventors: Stijn Willem STEENBRINK, Johan Joost Koning, Peter Veltman
  • Patent number: RE46452
    Abstract: An electrostatic lens comprising a first conductive plate with a first aperture, a second conductive plate with a second aperture, the second aperture being substantially aligned with the first aperture, a voltage supply for supplying a first voltage to the first conductive plate and a second voltage to the second conductive plate, the first voltage being lower than the second voltage, and an insulating structure for separating the first conductive plate from the second conductive plate. The insulating structure comprises a first portion in contact with the first conductive plate and a second portion in contact with the second conductive plate, the first portion having an overhanging portion and the second portion having an indented portion at an edge of the insulating structure, so that a gap is formed between the overhanging portion and the second conductive plate.
    Type: Grant
    Filed: June 12, 2014
    Date of Patent: June 27, 2017
    Assignee: MAPPER LITHOGRAPHY IP B.V.
    Inventors: Stijn Willem Herman Karel Steenbrink, Johan Joost Koning, Peter Veltman