Patents by Inventor Peter W. Gaudet
Peter W. Gaudet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20080267790Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: ApplicationFiled: July 10, 2008Publication date: October 30, 2008Inventors: Peter W. Gaudet, Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein, Steven C. Rosner
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Patent number: 7413411Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: GrantFiled: April 27, 2005Date of Patent: August 19, 2008Assignee: Brooks Automation, Inc.Inventors: Peter W. Gaudet, Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matté, Martin Stein, Steven C. Rosner
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Patent number: 7155919Abstract: An electronic controller maintains the operating temperature of a cryopump by controlling a heater coupled to the cryopump. The heater is coupled to a cryopumping surface of the cryopump. The controller can control the operation of the heater in response to feedback from temperature sensors coupled to the cryopump. The controller can cause the heater to shut-off if a temperature sensor reads out of its normal temperature range.Type: GrantFiled: December 31, 2003Date of Patent: January 2, 2007Assignee: Brooks Automation, Inc.Inventors: Peter W. Gaudet, Carol Olsen, legal representative, Michael J. Eacobacci, Olive Harvell, legal representative, Donald A. Olsen, deceased, John T. Harvell, deceased
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Patent number: 6902378Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: GrantFiled: March 8, 2002Date of Patent: June 7, 2005Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matté, Martin Stein, Steven C. Rosner
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Publication number: 20040194477Abstract: An electronic controller is used to control a vacuum gauge in a vacuum system. The electronic controller may be coupled to a vacuum pump in the vacuum system. Preferably, the vacuum pump is a cryopump. The electronic controller determines whether there is a potentially dangerous condition present in the vacuum system. A potentially dangerous condition may be present, for example, if there is a sufficient amount of gas in the vacuum pump to ignite. If the vacuum pump is filed with inert gas, such as nitrogen, then the potentially dangerous condition is not present. The potentially dangerous condition is present when the temperature of the vacuum pump is above a temperature setpoint, such as 20K. The electronic controller responds to a potentially dangerous condition by preventing the vacuum gauge from being turned on.Type: ApplicationFiled: December 31, 2003Publication date: October 7, 2004Applicant: Helix Technology CorporationInventors: Peter W. Gaudet, Donald A. Olsen, Michael J. Eacobacci, Carol Olsen, John T. Harvell, Olive Harvell
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Patent number: 6755028Abstract: In a cryogenic vacuum pump, after determining that a power fail recovery mode is on, and that the temperature is below a setpoint, the cryopump is automatically cooled. If the power fail recovery mode is on, and the temperature is above the setpoint, a regeneration cycle is started automatically. If the power fail recovery mode is off, the cryopump may be maintained in an off state. When a command to turn on a pressure sensing thermocouple (TC) gauge is received, the TC gauge is turned on only if there is not a sufficient amount of gas to ignite. When a command to turn on a roughing valve is received, an additional command must be received before the roughing valve is turned on. When a temperature-sensing diode is faulty, temperature control is automatically turned off. During a regeneration cycle, a purge test is performed. If the purge test passes, heaters are turned on. If the purge test fails, the heaters are turned on only if the temperature reaches a threshold within a predetermined period.Type: GrantFiled: August 20, 2002Date of Patent: June 29, 2004Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Donald A. Olsen, Michael J. Eacobacci
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Publication number: 20030051487Abstract: In a cryogenic vacuum pump, after determining that a power fail recovery mode is on, and that the temperature is below a setpoint, the cryopump is automatically cooled. If the power fail recovery mode is on, and the temperature is above the setpoint, a regeneration cycle is started automatically. If the power fail recovery mode is off, the cryopump may be maintained in an off state. When a command to turn on a pressure sensing thermocouple (TC) gauge is received, the TC gauge is turned on only if there is not a sufficient amount of gas to ignite. When a command to turn on a roughing valve is received, an additional command must be received before the roughing valve is turned on. When a temperature-sensing diode is faulty, temperature control is automatically turned off. During a regeneration cycle, a purge test is performed. If the purge test passes, heaters are turned on. If the purge test fails, the heaters are turned on only if the temperature reaches a threshold within a predetermined period.Type: ApplicationFiled: August 20, 2002Publication date: March 20, 2003Applicant: Helix Technology CorporationInventors: Peter W. Gaudet, Donald A. Olsen, Carol Olsen, Michael J. Eacobacci
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Patent number: 6461113Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: GrantFiled: December 3, 1999Date of Patent: October 8, 2002Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matté, Martin Stein, Steven C. Rosner
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Patent number: 6460351Abstract: A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.Type: GrantFiled: October 15, 2001Date of Patent: October 8, 2002Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Donald A. Olsen
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Publication number: 20020104320Abstract: A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.Type: ApplicationFiled: October 15, 2001Publication date: August 8, 2002Applicant: Helix Technology CorporationInventors: Peter W. Gaudet, Donald A. Olsen
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Publication number: 20020094277Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: ApplicationFiled: March 8, 2002Publication date: July 18, 2002Applicant: Helix Technology CorporationInventors: Peter W. Gaudet, Michael J. Eacobacci, Robert J. Lepofsky, David E. Roche, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein, Steven C. Rosner
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Patent number: 6318093Abstract: A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.Type: GrantFiled: April 5, 2001Date of Patent: November 20, 2001Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Donald A. Olsen
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Publication number: 20010012485Abstract: A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.Type: ApplicationFiled: April 5, 2001Publication date: August 9, 2001Applicant: Helix Technology CorporationInventors: Peter W. Gaudet, Donald A. Olsen
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Patent number: 6022195Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.Type: GrantFiled: August 21, 1995Date of Patent: February 8, 2000Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Michael J. Eacobacci, Robert J. Lepofsky, David E. Roche, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein, Steven C. Rosner
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Patent number: 5450316Abstract: A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.Type: GrantFiled: June 2, 1994Date of Patent: September 12, 1995Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Donald A. Olsen, Steven A. Bender
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Patent number: 5443368Abstract: A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated.Type: GrantFiled: July 16, 1993Date of Patent: August 22, 1995Assignee: Helix Technology CorporationInventors: Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte', Peter W. Gaudet, Martin Stein, Steven C. Rosner, Robert J. Lepofsky
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Patent number: 5343708Abstract: A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.Type: GrantFiled: September 11, 1992Date of Patent: September 6, 1994Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Donald A. Olsen
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Patent number: 5265431Abstract: A network of cryopumps, each having an electronic regeneration controller, is coupled to a common rough pump. Each regeneration controller operates independently except that each is inhibited from opening its roughing valve to the common rough pump. Each regeneration controller only proceeds to open the roughing valve after it has received a token from a network interface terminal. The network interface terminal may control multiple groups of cryopumps coupled to respective common rough pumps. The regeneration controllers are removable modules connected to the cryopumps. A PROM is provided for each cryopump to the side of the connector opposite to the module. The PROM stores data specific to the cryopump and retains the data for the cryopump with replacement of the controller module.Type: GrantFiled: August 27, 1992Date of Patent: November 30, 1993Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Paul E. Amundsen
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Patent number: 5176004Abstract: A network of cryopumps, each having an electronic regeneration controller, is coupled to a common rough pump. Each regeneration controller operates independently except that each is inhibited from opening its roughing valve to the common rough pump. Each regeneration controller only proceeds to open the roughing valve after it has received a token from a network interface terminal. The network interface terminal may control multiple groups of cryopumps coupled to respective common rough pumps. The regeneration controllers are removable modules connected to the cryopumps. A PROM is provided for each cryopump to the side of the connector opposite to the module. The PROM stores data specific to the cryopump and retains the data for the cryopump with replacement of the controller module.Type: GrantFiled: June 18, 1991Date of Patent: January 5, 1993Assignee: Helix Technology CorporationInventor: Peter W. Gaudet
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Patent number: 5157928Abstract: A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.Type: GrantFiled: May 20, 1991Date of Patent: October 27, 1992Assignee: Helix Technology CorporationInventors: Peter W. Gaudet, Donald A. Olsen, Michael J. Eacobacci, John T. Harvell, Robert J. Lepofsky, David E. Roche, Steven A. Bender