Abstract: Cell-aware fault models directly address layout-based intra-cell defects. They are created by performing analog simulations on the transistor-level netlist of a library cell and then by library view synthesis. The cell-aware fault models may be used to generate cell-aware test patterns, which usually have higher defect coverage than those generated by conventional ATPG techniques. The cell-aware fault models may also be used to improve defect coverage of a set of test patterns generated by conventional ATPG techniques.