Patents by Inventor Peter Wilhelm Hendrik VAN PUTTEN

Peter Wilhelm Hendrik VAN PUTTEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Droplet generator for lithographic apparatus, EUV source and lithographic apparatus
    Patent number: 10750604
    Abstract: An EUV source for generating a beam of EUV radiation, has a droplet generator with a nozzle assembly to emit droplets of fuel from a nozzle towards a plasma formation location. The nozzle assembly receives the fuel from a reservoir. The nozzle assembly has a pump chamber receiving the fuel from the reservoir and an actuator to vibrate a membrane that forms a wall of the pump chamber. The wall is oriented perpendicularly to a direction wherein the nozzle emits the fuel. The nozzle assembly has first and second nozzle filters non-adjacently arranged in series in a path of the fuel from the pump chamber to the nozzle.
    Type: Grant
    Filed: November 22, 2016
    Date of Patent: August 18, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Johan Frederik Dijksman, Wilhelmus Henricus Theodorus Maria Aangenent, Ronald Johannes Hultermans, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Peter Wilhelm Hendrik Van Putten
  • DROPLET GENERATOR FOR LITHOGRAPHIC APPARATUS, EUV SOURCE AND LITHOGRAPHIC APPARATUS
    Publication number: 20180368241
    Abstract: An EUV source for generating a beam of EUV radiation, has a droplet generator with a nozzle assembly to emit droplets of fuel from a nozzle towards a plasma formation location. The nozzle assembly receives the fuel from a reservoir. The nozzle assembly has a pump chamber receiving the fuel from the reservoir and an actuator to vibrate a membrane that forms a wall of the pump chamber. The wall is oriented perpendicularly to a direction wherein the nozzle emits the fuel. The nozzle assembly has first and second nozzle filters non-adjacently arranged in series in a path of the fuel from the pump chamber to the nozzle.
    Type: Application
    Filed: November 22, 2016
    Publication date: December 20, 2018
    Inventors: Johan Frederik DIJKSMAN, Wilhelmus Henricus Theodorus Maria AANGENENT, Ronald Johannes HULTERMANS, Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN, Peter Wilhelm Hendrik VAN PUTTEN