Patents by Inventor Peter Y. Lin

Peter Y. Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for preventing distortion of horizontal quartz tube caused by high temperature
    Patent number: 5584934
    Abstract: The present invention relates to an improved equipment in semiconductor processing. The invention includes a horizontal quartz tube surrounded with heating element for processing wafers, an inlet pipe of a gas injector mounted at the center of the closed end of a horizontal quartz tube, four sheath supports each being 90 degrees apart located at the closed end of a horizontal quartz tube for supporting a thermocouple sheath. The horizontal quartz tube is rotated 90 degrees every 14 to 15 days in a predetermined direction. As the horizontal quartz tube is rotated, the thermocouple sheath is always inserted into the sheath support located at the bottom of the horizontal quartz tube.
    Type: Grant
    Filed: October 13, 1995
    Date of Patent: December 17, 1996
    Assignee: United Microelectronics Corp.
    Inventor: Peter Y. Lin
  • Method for forming a capacitor in a DRAM cell using a rough overlayer of tungsten
    Patent number: 5427974
    Abstract: In accordance with the invention a rough overlayer, e.g., a tungsten film, is used to define a plurality of pillars in a polysilicon electrode layer. This increases the surface area of the polysilicon electrode and thus increases capacitance of a capacitor incorporating the electrode layer in a DRAM cell.
    Type: Grant
    Filed: March 18, 1994
    Date of Patent: June 27, 1995
    Assignee: United Microelectronics Corporation
    Inventors: Water Lur, Chang-Shyan Kao, Peter Y. Lin