Abstract: A directional valve having a valve housing having a primary port and at least one first and one second secondary port and a rotary piece arranged in the valve housing, which is penetrated by a channel and is rotatable about a rotation axis in order to adjust the directional valve between at least first and second switching positions. A first end of the channel is concentric to the axis. The rotary piece has an outer surface which is curved in a spherical cap-shaped manner, at which the second end of the channel opens. The valve housing has an inner surface which is curved in a spherical cap-shaped manner, at which inner surface secondary connection channels of the secondary connections open, and which is opposite the curve outer surface of the rotary piece. The curved outer surface of the rotary piece and the curved inner surface of the valve housing extend at most over the extent of a hemisphere.

Abstract: A vacuum adjustment device having a coupling for coupling an active element and a drive unit is disclosed. The drive unit adjusts the coupling from a normal position into an active position, in which the active element provides its intended effect. A separating device separates the process atmosphere region (P) from an outer atmosphere region (A), wherein the drive unit is at least partially associated with the outer atmosphere region (A). The coupling has a locking element cooperating with a collet which are arranged for a relative position variation axially along or parallel to a receiving axis that the locking element is adjustable relative to the collet into an open position and into a closed position. The coupling provides an open changing state in the open position by the interaction of the collet with the locking element and a closed working state in the closed position.

Abstract: A vacuum adjustment device having a coupling for coupling an active element and a drive unit is disclosed. The drive unit adjusts the coupling from a normal position into an active position, in which the active element provides its intended effect. A separating device separates the process atmosphere region (P) from an outer atmosphere region (A), wherein the drive unit is at least partially associated with the outer atmosphere region (A). The coupling has a locking element cooperating with a collet which are arranged for a relative position variation axially along or parallel to a receiving axis that the locking element is adjustable relative to the collet into an open position and into a closed position. The coupling provides an open changing state in the open position by the interaction of the collet with the locking element and a closed working state in the closed position.

Abstract: A valve, particularly a vacuum valve, with at least one closing body to close at least one penetrating opening of the valve and a drive to adjust the closing body between a closed position, in which the closing body closes the penetrating opening, and at least one opened position, in which the closing body at least partially releases the penetrating opening. The drive includes a first volume, which can be impinged with pressure, to adjust the closing body into its closed position and for adjusting it to an opened position, with the valve additionally having an elastic element, which pre-stresses the closing body in a direction of its closed position or its opened position.

Abstract: A vacuum valve comprises a valve body (1) with an inner cavity (4) through which a main passageway leads between an inlet (2) and an outlet (3) of the vacuum valve and with a main valve seat (6) which surrounds the main passageway, a main closing member (5) which is adjustable in the inner cavity (4) of the valve body between an open position, in which it is lifted from the main valve seat (6) and in which the main passageway through the vacuum valve is open, and a closed position, in which it tightly contacts the main valve seat (6) and in which the main passageway through the vacuum valve is closed, and which has an inner cavity (10) through which an additional passageway leads and an additional valve seat (14) surrounding the additional passageway, an additional closing member (11) which is adjustable in the inner cavity (10) of the main closing member (5) between an open position, in which it is lifted from the additional valve seat (14) and in which the additional passageway through the vacuum valve is o