Patents by Inventor Petra Albertina Dekkers-Rog

Petra Albertina Dekkers-Rog has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Level sensor for lithographic apparatus
    Publication number: 20050274909
    Abstract: A level sensor for a lithographic projection apparatus includes a light source configured to direct light onto a substrate to be measured, a detector configured to detect light reflected from the substrate, and a processor configured to calculate a difference between measurements made with the filter in the first configuration and in the second configuration. The sensor is adjustable between a first configuration, in which the light is given a first property, and a second configuration, in which the light is given a second property. The sensor may include a polarizing filter, such that the first and second properties are different polarization states.
    Type: Application
    Filed: June 10, 2004
    Publication date: December 15, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Paulus Teunissen, Rene Marinus Queens, Petra Albertina Dekkers-Rog, Alexander Charles Van Well