Abstract: An x-ray detection system (400) for detecting a deflected X-ray beam (206) from a sample (204) comprising a detector (402) having an array of pixels enabled to receive the X-ray beam area at the detector (402), a image processing means (404) for reading out a sample image from the detector (402) and a region of interest extraction means (406, 408) for extracting a sub-image of a first area from the sample image. The sub-image is typically a narrow strip of the array of pixels to obtain a “virtual slit” image or a circular area of the array of pixels to obtain a “virtual aperture” image. More than one sub-image may be extracted from the sample image taken from the detector (402).

Abstract: An X-ray topographic system comprises an X-ray generator producing a beam of X-rays impinging on a limited area of a sample such as a silicon wafer. A solid state detector is positioned to intercept the beam after transmission through or reflection from the sample. The detector has an array of pixels matching the beam area to produce a digital image of said limited area. Relative stepping motion between the X-ray generator and the sample produces a series of digital images which are combined together. In optional embodiments, an X-ray optic is interposed to produce a parallel beam to avoid image doubling, or the effect of image doubling is removed by software.

Abstract: An X-ray topographic system comprises an X-ray generator producing a beam of X-rays impinging on a limited area of a sample such as a silicon wafer. A solid state detector is positioned to intercept the beam after transmission through or reflection from the sample. The detector has an array of pixels matching the beam area to produce a digital image of said limited area. Relative stepping motion between the X-ray generator and the sample produces a series of digital images which are combined together. In optional embodiments, an X-ray optic is interposed to produce a parallel beam to avoid image doubling, or the effect of image doubling is removed by software.