Patents by Inventor Petra Margaretha Dekkers-Rog

Petra Margaretha Dekkers-Rog has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby
    Publication number: 20050138988
    Abstract: A method according to one embodiment of the invention may be performed using a calibration plate having at least one alignment marker and at least one height profile. First, the calibration plate is positioned using an alignment sensor. Then the height profile is measured by a height sensor. Then the calibration plate is rotated by substantially 180 degrees and the two operations are repeated. This procedure results in two measured height profiles, which are compared in order to find a best fit. The amount of shift performed to find the best fit is used to determine a distance between the alignment marker and the X,Y position of the measurement point of the height sensor.
    Type: Application
    Filed: December 29, 2003
    Publication date: June 30, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Leon Levasier, Anastasius Anicetus Bruinsma, Jacob Fredrik Klinkhamer, Gerrit Nijmeijer, Petra Margaretha Dekkers-Rog