Patents by Inventor Petrus Augustinus Franciscus KLOMP

Petrus Augustinus Franciscus KLOMP has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic clamp
    Patent number: 9939737
    Abstract: An electrostatic clamp (12) comprising an electrode (2), a layer of resistive material (6) located on the electrode, and a layer of dielectric (8) located on the resistive material, wherein the electrostatic clamp further comprises burls (10) which project from the layer of dielectric.
    Type: Grant
    Filed: December 5, 2013
    Date of Patent: April 10, 2018
    Assignee: ASML Netherlands B.V.
    Inventors: Petrus Augustinus Franciscus Klomp, Bastiaan Matthias Mertens, Arnoud Willem Notenboom
  • Electrostatic Clamp
    Publication number: 20150370178
    Abstract: An electrostatic clamp (12) comprising an electrode (2), a layer of resistive material (6) located on the electrode, and a layer of dielectric (8) located on the resistive material, wherein the electrostatic clamp further comprises burls (10) which project from the layer of dielectric.
    Type: Application
    Filed: December 5, 2013
    Publication date: December 24, 2015
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Petrus Augustinus Franciscus KLOMP, Bastiaan Matthias MERTENS, Arnoud Willem NOTENBOOM