Patents by Inventor Petrus Gerrits

Petrus Gerrits has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus
    Publication number: 20070085987
    Abstract: The invention provides a height detecting apparatus for a lithographic apparatus. The height mapping apparatus includes a height mapping unit for providing at least one height map of a top surface of an object to be placed in a radiation beam of the lithographic apparatus, the object to be clamped by a clamping force applied thereto on a support constructed to support the object. The height mapping apparatus also includes a control unit for controlling the mapping unit to provide the at least one height map of the object relative to at least two different clamping pressure levels.
    Type: Application
    Filed: October 18, 2005
    Publication date: April 19, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Joost Ottens, Aschwin Lodewijk Hendricus Van Meer, Wim Tel, Jacob Vink, Rene Theodorus Compen, Petrus Gerrits