Patents by Inventor Petrus, Martinus, Gerardus, Jothannes ARTS

Petrus, Martinus, Gerardus, Jothannes ARTS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CLEANING DEVICE AND METHOD OF CLEANING
    Publication number: 20210116824
    Abstract: A cleaning device for an apparatus for processing production substrates, the cleaning device including: a body having dimensions similar to the production substrates so that the cleaning device is compatible with the apparatus, the body having a first major surface and a second major surface facing in the opposite direction to the first major surface; a chamber within the body configured to accommodate contaminants; an inlet from the first major surface to the chamber and configured to allow contaminants to be drawn into the chamber by a flow of fluid; and an outlet from the chamber to the second major surface, the cleaning device being configured to allow the fluid to exit the chamber but to prevent a contaminant leaving the chamber.
    Type: Application
    Filed: March 13, 2019
    Publication date: April 22, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Miao YU, Petrus, Martinus, Gerardus, Jothannes ARTS, Erik, Henricus, Egidius, Catharina EUMMELEN, Giovanni Luca GATTOBIGIO, Maarten HOLTRUST, Han, Henricus, Aldegonda LEMPENS, Ferdy MIGCHELBRINK, Theodorus Wilhelmus POLET, Gheorghe TANASA