Patents by Inventor Petrus Matthijs Vosters

Petrus Matthijs Vosters has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Movable carriage for a lithographic apparatus and device manufacturing method
    Publication number: 20060011855
    Abstract: A movable carriage for moving an article support member in a lithographic apparatus is provided. The article support member is constructed and arranged to move and support an article to be placed in a beam path of the lithographic apparatus. The carriage includes a compartmented composite structure.
    Type: Application
    Filed: September 22, 2005
    Publication date: January 19, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Martinus Arnoldus Terken, Hernes Jacobs, Harmen Klaas Schoot, Petrus Matthijs Vosters, Koen Jacobus Zaal
  • Lithographic apparatus and device manufacturing method
    Publication number: 20050190351
    Abstract: A lithographic projection apparatus in which a reaction force is generated between a balance mass and a substrate table. The balance mass is elastically coupled to the base frame with a suspension eigenfrequency of between 0.3 and 10 Hz.
    Type: Application
    Filed: May 2, 2005
    Publication date: September 1, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Henrikus Cox, Robertus Nicodemus Van Ballegoij, Petrus Matthijs Vosters, Sven Antoin Hol, Sebastiaan Maria Cornelissen