Patents by Inventor Petrus Wilhelmus VLEESHOUWERS

Petrus Wilhelmus VLEESHOUWERS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stage apparatus suitable for electron beam inspection apparatus
    Patent number: 11764030
    Abstract: Disclosed is a stage apparatus comprising: an object support configured to support an object; a positioning device configured to position the object support; a first connection arrangement configured to connect the object support to the positioning device, the first connection arrangement comprising at least one damped connection; and a second connection arrangement configured to connect the object support to the positioning device, the second connection arrangement comprising at least one substantially rigid connection.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: September 19, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Johannes Hubertus Antonius Van De Rijdt, Peter Paul Hempenius, Allard Eelco Kooiker, Jef Goossens, Petrus Wilhelmus Vleeshouwers
  • STAGE APPARATUS SUITABLE FOR ELECTRON BEAM INSPECTION APPARATUS
    Publication number: 20200194222
    Abstract: Disclosed is a stage apparatus comprising: an object support configured to support an object; a positioning device configured to position the object support; a first connection arrangement configured to connect the object support to the positioning device, the first connection arrangement comprising at least one damped connection; and a second connection arrangement configured to connect the object support to the positioning device, the second connection arrangement comprising at least one substantially rigid connection.
    Type: Application
    Filed: December 13, 2019
    Publication date: June 18, 2020
    Inventors: Johannes Hubertus Antonius VAN DE RIJDT, Peter Paul HEMPENIUS, Allard Eelco KOOIKER, Jef GOOSSENS, Petrus Wilhelmus VLEESHOUWERS