Patents by Inventor Phil J. Ring

Phil J. Ring has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion beam monitoring in an ion implanter using an imaging device
    Patent number: 7423277
    Abstract: An image monitor system monitors characteristics of an ion beam employed in ion implantation. The monitored characteristics can include particle count, particle information, beam current intensity, beam shape, and the like. The system includes one or more image sensors that capture frames or images along a beam path of an ion beam. An image analyzer analyzes the captured frames to obtain measured characteristics. A controller determines adjustments or corrections according to the measured characteristics and desired beam characteristics.
    Type: Grant
    Filed: March 14, 2006
    Date of Patent: September 9, 2008
    Assignee: Axcelis Technologies, Inc.
    Inventors: Alexander S. Perel, Phil J. Ring, Ronald A. Capodilupo, Michael A. Graf
  • Ion beam monitoring in an ion implanter using an imaging device
    Publication number: 20080061250
    Abstract: An image monitor system monitors characteristics of an ion beam employed in ion implantation. The monitored characteristics can include particle count, particle information, beam current intensity, beam shape, and the like. The system includes one or more image sensors that capture frames or images along a beam path of an ion beam. An image analyzer analyzes the captured frames to obtain measured characteristics. A controller determines adjustments or corrections according to the measured characteristics and desired beam characteristics.
    Type: Application
    Filed: March 14, 2006
    Publication date: March 13, 2008
    Inventors: Alexander S. Perel, Phil J. Ring, Ronald A. Capodilupo, Michael A. Graf