Patents by Inventor Philip Alan Kraus

Philip Alan Kraus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical modification of hardmask films for enhanced etching and selective removal
    Patent number: 10115593
    Abstract: Embodiments include a method of processing a hardmask that includes forming an alloyed carbon hardmask over an underlying layer. In an embodiment, the alloyed carbon hardmask is alloyed with metallic-carbon fillers. The embodiment further includes patterning the alloyed carbon hardmask and transferring the pattern of the alloyed carbon hardmask into the underlying layer. According to an embodiment, the method may further include removing the metallic component of the metallic-carbon fillers from the alloyed carbon hardmask to form a porous carbon hardmask. Thereafter, the porous hardmask may be removed. In an embodiment, the metallic component of the metallic-carbon fillers may include flowing a processing gas into a chamber that volatizes the metallic component of the metallic-carbon fillers.
    Type: Grant
    Filed: December 6, 2017
    Date of Patent: October 30, 2018
    Assignee: Applied Materials, Inc.
    Inventors: David Knapp, Simon Huang, Jeffrey W. Anthis, Philip Alan Kraus, David Thompson
  • CHEMICAL MODIFICATION OF HARDMASK FILMS FOR ENHANCED ETCHING AND SELECTIVE REMOVAL
    Publication number: 20180096834
    Abstract: Embodiments include a method of processing a hardmask that includes forming an alloyed carbon hardmask over an underlying layer. In an embodiment, the alloyed carbon hardmask is alloyed with metallic-carbon fillers. The embodiment further includes patterning the alloyed carbon hardmask and transferring the pattern of the alloyed carbon hardmask into the underlying layer. According to an embodiment, the method may further include removing the metallic component of the metallic-carbon fillers from the alloyed carbon hardmask to form a porous carbon hardmask. Thereafter, the porous hardmask may be removed. In an embodiment, the metallic component of the metallic-carbon fillers may include flowing a processing gas into a chamber that volatizes the metallic component of the metallic-carbon fillers.
    Type: Application
    Filed: December 6, 2017
    Publication date: April 5, 2018
    Inventors: David KNAPP, Simon HUANG, Jeffrey W. ANTHIS, Philip Alan KRAUS, David THOMPSON
  • Chemical modification of hardmask films for enhanced etching and selective removal
    Patent number: 9870915
    Abstract: Embodiments include a method of processing a hardmask that includes forming an alloyed carbon hardmask over an underlying layer. In an embodiment, the alloyed carbon hardmask is alloyed with metallic-carbon fillers. The embodiment further includes patterning the alloyed carbon hardmask and transferring the pattern of the alloyed carbon hardmask into the underlying layer. According to an embodiment, the method may further include removing the metallic component of the metallic-carbon fillers from the alloyed carbon hardmask to form a porous carbon hardmask. Thereafter, the porous hardmask may be removed. In an embodiment, the metallic component of the metallic-carbon fillers may include flowing a processing gas into a chamber that volatizes the metallic component of the metallic-carbon fillers.
    Type: Grant
    Filed: October 1, 2016
    Date of Patent: January 16, 2018
    Assignee: Applied Materials, Inc.
    Inventors: David Knapp, Simon Huang, Jeffrey W. Anthis, Philip Alan Kraus, David Thompson