Abstract: A system may be configured to monitor an amount of a gas species in a processing chamber using Optical Emission Spectrometry. The gas measurement may be provided as feedback to a control process that generates a target setpoint for a gas flow controller into the process chamber. This real-time process may increase/decrease the flow rate of the gas in order to maintain a process deposition mode within a transition region between primarily metallic deposition and primarily compound deposition.

Abstract: A system may be configured to monitor an amount of a gas species in a processing chamber using Optical Emission Spectrometry. The gas measurement may be provided as feedback to a control process that generates a target setpoint for a gas flow controller into the process chamber. This real-time process may increase/decrease the flow rate of the gas in order to maintain a process deposition mode within a transition region between primarily metallic deposition and primarily compound deposition.

Abstract: A method of forming walls for pools, waterfalls and the like having surfaces accurately simulating material surfaces, such as rock surfaces. The method is comprised of the steps of coating a rock surface to be simulated with latex, coating the latex with urethane resin, and allowing the resin to foam in place. The urethane foam-latex member is then removed from the rock to be simulated and is used as one wall of the pouring form for forming the corresponding wall of the pool, etc. In the case of swimming pools, a trench in the position of the desired walls of a pool can be dug with the inner surfaces of the trench provided with the foam-latex panels for forming the simulated rock surface on the resulting pool walls. Alternate embodiments and methods of practicing the invention are disclosed.