Patents by Inventor Philip Engesser

Philip Engesser has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for an etch treatment of a disk-like object
    Patent number: 6328846
    Abstract: The invention concerns a device for an etch treatment of a disk-like object, in particular a wafer, having a means for receiving the disk-like object without contact and at least two guiding elements disposed normally to the means and limiting the position of the disk-like object at its periphery.
    Type: Grant
    Filed: January 18, 2000
    Date of Patent: December 11, 2001
    Assignee: SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG
    Inventors: Kurt Langen, Philip Engesser